Fe distribution around hydride VPE InP:Fe regrown laser stripes

In hydride VPE, mesa stripe structures are regrown in a lateral growth mode exceeding the normal planar growth rate by more than an order of magnitude depending on the stripe orientation. During the embedding of mesas with InP:Fe a dilution of the Fe dopant due to the increased growth velocity in th...

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Bibliographische Detailangaben

Hauptverfasser:	Gobel, R., Janning, H., Burkhard, H.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Doping Dry etching Indium phosphide Iron Laser modes Optoelectronic devices Polyimides Production Substrates Thermal conductivity
Online-Zugang:	Volltext bestellen
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