A low-noise parasitic-insensitive switched-capacitor CMOS interface circuit for MEMS capacitive sensors

This paper describes a differential low-noise high-resolution parasitic-insensitive switched-capacitor readout circuit that is intended for capacitive sensors, in particular, for MEMS inertial sensory systems. The operation of the proposed readout front-end circuit is explained. Amplitude modulation...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Shiah, J., Rashtian, H., Mirabbasi, S.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Capacitance Capacitive sensors Capacitors Clocks Micromechanical devices Noise
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