Sol-gel deposition of PZT thin films on ceramic ZrO/sub 2/ substrates

Pb(Zr/sub 1-x/Ti/sub x/)O/sub 3/ thin films (x=0.55 and 0.85) were prepared on fine grained, polished ZrO/sub 2/ ceramic substrates by a sol-gel method. The high thermal expansion of ZrO/sub 2/ relative to Si allows the preparation of thicker PZT films with reduced thermal stress. For the x=0.85 fil...

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Bibliographische Detailangaben

Hauptverfasser:	Brooks, K.G., Kohli, M., Taylor, D.V., Maeder, T., Reaney, I., Kholkin, A., Muralt, P., Setter, N.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Ceramics Hysteresis Pyroelectricity Semiconductor films Sputtering Substrates Thermal expansion Thermal stresses Thickness measurement Transistors
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