Damping and mass sensitivity of laterally vibrating resonant microcantilevers in viscous liquid media

The effect of liquid viscosity and density on the characteristics of laterally excited microcantilevers is investigated and compared to transversely excited microcantilevers. When immersed into a viscous liquid medium such as water from air, the resonant frequency of laterally (in-plane) vibrating m...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Cox, R., Jinjin Zhang, Josse, F., Heinrich, S. M., Dufour, I., Beardslee, L. A., Brand, O.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Damping Engineering Sciences Geometry Micro and nanotechnologies Microelectronics Q factor Resonant frequency Sensitivity Viscosity
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