Design and analysis of a novel two DOF thermal micromanipulator

In this paper, a novel thermal microactuator is designed which is capable of producing bi-directional lateral and rotational output and one of its applications as a two DOF micromanipulator is shown. Also, by carefully choosing the doping level, temperature distribution is determined by considering...

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Bibliographische Detailangaben
Hauptverfasser: Pourzand, H., Ghaemi, R., Alasty, A.
Format: Tagungsbericht
Sprache:eng
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