Fabrication of high aspect ratio carbon nanotube-carbon composite microstructures based on silicon molding technique
This paper reports the fabrication and characterization of carbon nanotube (CNT)/carbon composite microstructures with higher Young's modulus than that of pyrolysis carbon. Hybrid microstructures consisted of CNT composite and Si are successfully fabricated by micromolding and pyrolysis of a re...
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| creator | Liang He Toda, M. Kawai, Y. Miyashita, H. Chuanyu Shao Omori, M. Hashida, T. Ono, T. |
| description | This paper reports the fabrication and characterization of carbon nanotube (CNT)/carbon composite microstructures with higher Young's modulus than that of pyrolysis carbon. Hybrid microstructures consisted of CNT composite and Si are successfully fabricated by micromolding and pyrolysis of a resist (SU-8) mixed with CNTs. The photoresist mixed with CNTs is filled into a Si micromold fabricated by deep reactive ion etching (deep RIE), then the CNT/resist is converted to CNT/carbon microstructures using two-step high temperature pyrolysis process in an inert gas. Then, the Si substrate is patterned by deep RIE. The maximum aspect ratio of the composite structures is approximately 40. |
| doi_str_mv | 10.1109/TRANSDUCERS.2011.5969549 |
| format | Conference Proceeding |
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Hybrid microstructures consisted of CNT composite and Si are successfully fabricated by micromolding and pyrolysis of a resist (SU-8) mixed with CNTs. The photoresist mixed with CNTs is filled into a Si micromold fabricated by deep reactive ion etching (deep RIE), then the CNT/resist is converted to CNT/carbon microstructures using two-step high temperature pyrolysis process in an inert gas. Then, the Si substrate is patterned by deep RIE. The maximum aspect ratio of the composite structures is approximately 40.</description><identifier>ISSN: 2159-547X</identifier><identifier>ISBN: 9781457701573</identifier><identifier>ISBN: 145770157X</identifier><identifier>EISBN: 1457701553</identifier><identifier>EISBN: 9781457701566</identifier><identifier>EISBN: 1457701561</identifier><identifier>EISBN: 9781457701559</identifier><identifier>DOI: 10.1109/TRANSDUCERS.2011.5969549</identifier><language>eng</language><publisher>IEEE</publisher><subject>Carbon ; Carbon nanotube ; Carbon nanotubes ; Composite microstructures ; Deep reactive ion etching ; Fabrication ; Microstructure ; Pyrolysis carbon ; Resists ; Silicon ; Silicon molding ; Young's modulus</subject><ispartof>2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, 2011, p.2331-2334</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5969549$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2058,27925,54920</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5969549$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Liang He</creatorcontrib><creatorcontrib>Toda, M.</creatorcontrib><creatorcontrib>Kawai, Y.</creatorcontrib><creatorcontrib>Miyashita, H.</creatorcontrib><creatorcontrib>Chuanyu Shao</creatorcontrib><creatorcontrib>Omori, M.</creatorcontrib><creatorcontrib>Hashida, T.</creatorcontrib><creatorcontrib>Ono, T.</creatorcontrib><title>Fabrication of high aspect ratio carbon nanotube-carbon composite microstructures based on silicon molding technique</title><title>2011 16th International Solid-State Sensors, Actuators and Microsystems Conference</title><addtitle>TRANSDUCERS</addtitle><description>This paper reports the fabrication and characterization of carbon nanotube (CNT)/carbon composite microstructures with higher Young's modulus than that of pyrolysis carbon. Hybrid microstructures consisted of CNT composite and Si are successfully fabricated by micromolding and pyrolysis of a resist (SU-8) mixed with CNTs. The photoresist mixed with CNTs is filled into a Si micromold fabricated by deep reactive ion etching (deep RIE), then the CNT/resist is converted to CNT/carbon microstructures using two-step high temperature pyrolysis process in an inert gas. Then, the Si substrate is patterned by deep RIE. The maximum aspect ratio of the composite structures is approximately 40.</description><subject>Carbon</subject><subject>Carbon nanotube</subject><subject>Carbon nanotubes</subject><subject>Composite microstructures</subject><subject>Deep reactive ion etching</subject><subject>Fabrication</subject><subject>Microstructure</subject><subject>Pyrolysis carbon</subject><subject>Resists</subject><subject>Silicon</subject><subject>Silicon molding</subject><subject>Young's modulus</subject><issn>2159-547X</issn><isbn>9781457701573</isbn><isbn>145770157X</isbn><isbn>1457701553</isbn><isbn>9781457701566</isbn><isbn>1457701561</isbn><isbn>9781457701559</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2011</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNo1kE1OwzAUhI0AiVJyAja-QIqd2LG9rEoLSBVIbZDYVY790ho1cbGdBbcniDKbTzPvZzEIYUpmlBL1UG_mr9vH98Vys50VhNIZV5XiTF2gW8q4EIRyXl6iTAn570V5hSYF5SrnTHzcoCzGTzKqGg-lmqC00k1wRifne-xbfHD7A9bxBCbh8Jtio0Mzznrd-zQ0kJ-98d3JR5cAd84EH1MYTBoCRNzoCBaPK9EdnRnZ-aN1_R4nMIfefQ1wh65bfYyQnTlF9WpZL57z9dvTy2K-zp0iKQfbEK61LAhowySzsq2kZIQAL5QSRBjeFoJRK1qgrYayImBNKWwBTBpNyym6_3vrAGB3Cq7T4Xt37qz8Aa9jY1w</recordid><startdate>201106</startdate><enddate>201106</enddate><creator>Liang He</creator><creator>Toda, M.</creator><creator>Kawai, Y.</creator><creator>Miyashita, H.</creator><creator>Chuanyu Shao</creator><creator>Omori, M.</creator><creator>Hashida, T.</creator><creator>Ono, T.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>201106</creationdate><title>Fabrication of high aspect ratio carbon nanotube-carbon composite microstructures based on silicon molding technique</title><author>Liang He ; Toda, M. ; Kawai, Y. ; Miyashita, H. ; Chuanyu Shao ; Omori, M. ; Hashida, T. ; Ono, T.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i90t-edb05aa820eac484d8f688400e5299707c5f2741d7fe1fae360edc37d2e48ca13</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2011</creationdate><topic>Carbon</topic><topic>Carbon nanotube</topic><topic>Carbon nanotubes</topic><topic>Composite microstructures</topic><topic>Deep reactive ion etching</topic><topic>Fabrication</topic><topic>Microstructure</topic><topic>Pyrolysis carbon</topic><topic>Resists</topic><topic>Silicon</topic><topic>Silicon molding</topic><topic>Young's modulus</topic><toplevel>online_resources</toplevel><creatorcontrib>Liang He</creatorcontrib><creatorcontrib>Toda, M.</creatorcontrib><creatorcontrib>Kawai, Y.</creatorcontrib><creatorcontrib>Miyashita, H.</creatorcontrib><creatorcontrib>Chuanyu Shao</creatorcontrib><creatorcontrib>Omori, M.</creatorcontrib><creatorcontrib>Hashida, T.</creatorcontrib><creatorcontrib>Ono, T.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Liang He</au><au>Toda, M.</au><au>Kawai, Y.</au><au>Miyashita, H.</au><au>Chuanyu Shao</au><au>Omori, M.</au><au>Hashida, T.</au><au>Ono, T.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Fabrication of high aspect ratio carbon nanotube-carbon composite microstructures based on silicon molding technique</atitle><btitle>2011 16th International Solid-State Sensors, Actuators and Microsystems Conference</btitle><stitle>TRANSDUCERS</stitle><date>2011-06</date><risdate>2011</risdate><spage>2331</spage><epage>2334</epage><pages>2331-2334</pages><issn>2159-547X</issn><isbn>9781457701573</isbn><isbn>145770157X</isbn><eisbn>1457701553</eisbn><eisbn>9781457701566</eisbn><eisbn>1457701561</eisbn><eisbn>9781457701559</eisbn><abstract>This paper reports the fabrication and characterization of carbon nanotube (CNT)/carbon composite microstructures with higher Young's modulus than that of pyrolysis carbon. Hybrid microstructures consisted of CNT composite and Si are successfully fabricated by micromolding and pyrolysis of a resist (SU-8) mixed with CNTs. The photoresist mixed with CNTs is filled into a Si micromold fabricated by deep reactive ion etching (deep RIE), then the CNT/resist is converted to CNT/carbon microstructures using two-step high temperature pyrolysis process in an inert gas. Then, the Si substrate is patterned by deep RIE. The maximum aspect ratio of the composite structures is approximately 40.</abstract><pub>IEEE</pub><doi>10.1109/TRANSDUCERS.2011.5969549</doi><tpages>4</tpages></addata></record> |
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| identifier | ISSN: 2159-547X |
| ispartof | 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, 2011, p.2331-2334 |
| issn | 2159-547X |
| language | eng |
| recordid | cdi_ieee_primary_5969549 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Carbon Carbon nanotube Carbon nanotubes Composite microstructures Deep reactive ion etching Fabrication Microstructure Pyrolysis carbon Resists Silicon Silicon molding Young's modulus |
| title | Fabrication of high aspect ratio carbon nanotube-carbon composite microstructures based on silicon molding technique |
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