Silicon micromachined photonic crystal integrated in an opto-fluidic microsystem

In this work, fabrication and testing of closed-loop opto-fluidic microsystems integrating both optical and fluidic functionalities on the same chip are reported. The microsystems consisted of an electrochemically micromachined silicon substrate, on which high-order vertical silicon/air one dimensio...

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Hauptverfasser: Surdo, S., Strambini, L. M., Barillaro, G., Carpignano, F. M., Merlo, S.
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Strambini, L. M.
Barillaro, G.
Carpignano, F. M.
Merlo, S.
description In this work, fabrication and testing of closed-loop opto-fluidic microsystems integrating both optical and fluidic functionalities on the same chip are reported. The microsystems consisted of an electrochemically micromachined silicon substrate, on which high-order vertical silicon/air one dimensional photonic crystals (1D PhCs) were integrated together with fluidic microchannels, bonded to a glass cover, the latter provided with inlet/outlet holes for liquid injection/extraction in/out the PhCs air gaps. An experimental characterization was performed by pumping different liquids (water, ethanol, isopropanol) through the opto-fluidic microsystem and by measuring the reflectivity spectrum in the wavelength range 1.0 - 1.7 μm (at normal incidence) with an inplane fiber optic setup. Experimental results, which well agreed with theoretical predictions, demonstrated the high sensitivity of the opto-fluidic microsystem in measuring small refractive index changes, which was estimated to be 1049 nm/RIU.
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subjects Optical device fabrication
Optical fibers
Optical reflection
Optical refraction
Optical sensors
Optical variables control
Silicon
title Silicon micromachined photonic crystal integrated in an opto-fluidic microsystem
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