Automated handling and assembly of customizable AFM-tips

Today's processes in micro- and nanofabrication include several critical dimension metrology steps to guarantee device performance. Especially in the manufacturing process of novel disruptive photonic devices and nanoelectronic circuit architectures, new 3D acquisition and visualization techniq...

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Bibliographische Detailangaben

Hauptverfasser:	Bartenwerfer, M., Eichhorn, V., Jasper, D., Fatikow, S., Savenko, A., Petersen, D. H., Malm, B., Boggild, P.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	AFM-tip Assembly automation Cavity resonators characterization customizable Fabrication Grippers Milling nano-assembling optical waveguide Shape Substrates
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