A dual side electroluminescence measurement system for LED wafer manufacturing

The development of a system that evaluates the performances of an LED (light-emitting diode) wafer using a non-destructive test method after crystal growth and before chip processing is presented. The system measures electroluminescent characteristics of two sides of an epi-wafer. When a probe makes...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Kim, H. T., Kim, J., Kim, S. T., Hwan-Kuk Yuh, Dae-Hoon Kim, Ahn, D. H.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Current measurement EL imaging Electrodes Electroluminescence Epi-wafer LED Test Light emitting diodes Optical Spectrometer Optical variables measurement Probes Semiconductor device measurement Wavelength measurement
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