Temporal instability of suppressor ensembles under reactive conditions

The temporal instability of different types of suppressor additives relevant for Damascene and 3D-TSV copper electroplating is studied by means of potential transient experiments in combination with structure sensitive methods such as in-situ scanning tunneling microscopy and in-situ synchrotron x-r...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Fluegel, A., Arnold, M., Wagner, A., Mayer, D., Hai, M. N. T., Trung, H. T. M., Odermatt, J., Broekmann, P.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Acceleration Additives Chemistry Copper Electric potential Electrodes Surface treatment
Online-Zugang:	Volltext bestellen
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