Good temperature coefficient of frequency SAW resonator on a SiO2/Al/LiNbO3 structure

This paper describes a good temperature coefficient of frequency (TCF) surface acoustic wave (SAW) resonator on a SiO 2 /Al/LiNbO 3 structure. We studied the dependence of TCF and electromechanical coupling factor (K 2 ) of shear-horizontal (SH) SAW on the SiO 2 thickness, where the SiO 2 shape cont...

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Bibliographische Detailangaben

Hauptverfasser:	Nakanishi, H., Nakamura, H., Tsurunari, T., Fujiwara, J., Hamaoka, Y., Hashimoto, K.
Format:	Tagungsbericht
Sprache:	eng ; jpn
Schlagworte:	Lithium niobate Rayleigh-mode spurious response Resonant frequency SAW resonator Shape Shape control SiO 2 /Al/LiNbO 3 structure SiO 2 shape control Surface acoustic waves TCF Temperature
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