Micromachined microwave transmission lines by commercial CMOS fabrication
Coplanar waveguides were designed and fabricated in standard CMOS with post-processing micromachining. Transmission line layouts were designed with commercial CAD tools, ICs were fabricated through a commercial CMOS foundry, and subsequently suspended by maskless top-side etching. Absence of the los...
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| creator | Milanovic, V. Gaitan, M. Bowen, E.D. Zaghloul, M.E. |
| description | Coplanar waveguides were designed and fabricated in standard CMOS with post-processing micromachining. Transmission line layouts were designed with commercial CAD tools, ICs were fabricated through a commercial CMOS foundry, and subsequently suspended by maskless top-side etching. Absence of the lossy silicon substrate after etching results in significantly improved insertion loss and dispersion characteristics, and phase velocity. Two types of layout are presented for different ranges of characteristic impedance. Measurements were performed at frequencies from 1 GHz to 40 GHz, before and after micromachining. These show improvement of loss characteristics of orders of magnitude. For the entire range of frequencies, for the 50 /spl Omega/ layout, losses do not exceed 4 dB/cm. Before etching, losses are as high as 38 dB/cm. Phase velocity in the micromachined transmission lines is close to that in free space. |
| doi_str_mv | 10.1109/MWSCAS.1996.593085 |
| format | Conference Proceeding |
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Transmission line layouts were designed with commercial CAD tools, ICs were fabricated through a commercial CMOS foundry, and subsequently suspended by maskless top-side etching. Absence of the lossy silicon substrate after etching results in significantly improved insertion loss and dispersion characteristics, and phase velocity. Two types of layout are presented for different ranges of characteristic impedance. Measurements were performed at frequencies from 1 GHz to 40 GHz, before and after micromachining. These show improvement of loss characteristics of orders of magnitude. For the entire range of frequencies, for the 50 /spl Omega/ layout, losses do not exceed 4 dB/cm. Before etching, losses are as high as 38 dB/cm. Phase velocity in the micromachined transmission lines is close to that in free space.</description><identifier>ISBN: 9780780336360</identifier><identifier>ISBN: 0780336364</identifier><identifier>DOI: 10.1109/MWSCAS.1996.593085</identifier><language>eng</language><publisher>IEEE</publisher><subject>Coplanar transmission lines ; Coplanar waveguides ; Design automation ; Etching ; Foundries ; Frequency ; Insertion loss ; Micromachining ; Silicon ; Transmission lines</subject><ispartof>Proceedings of the 39th Midwest Symposium on Circuits and Systems, 1996, Vol.3, p.1189-1192 vol.3</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/593085$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2058,4050,4051,27925,54920</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/593085$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Milanovic, V.</creatorcontrib><creatorcontrib>Gaitan, M.</creatorcontrib><creatorcontrib>Bowen, E.D.</creatorcontrib><creatorcontrib>Zaghloul, M.E.</creatorcontrib><title>Micromachined microwave transmission lines by commercial CMOS fabrication</title><title>Proceedings of the 39th Midwest Symposium on Circuits and Systems</title><addtitle>MWSCAS</addtitle><description>Coplanar waveguides were designed and fabricated in standard CMOS with post-processing micromachining. Transmission line layouts were designed with commercial CAD tools, ICs were fabricated through a commercial CMOS foundry, and subsequently suspended by maskless top-side etching. Absence of the lossy silicon substrate after etching results in significantly improved insertion loss and dispersion characteristics, and phase velocity. Two types of layout are presented for different ranges of characteristic impedance. Measurements were performed at frequencies from 1 GHz to 40 GHz, before and after micromachining. These show improvement of loss characteristics of orders of magnitude. For the entire range of frequencies, for the 50 /spl Omega/ layout, losses do not exceed 4 dB/cm. Before etching, losses are as high as 38 dB/cm. Phase velocity in the micromachined transmission lines is close to that in free space.</description><subject>Coplanar transmission lines</subject><subject>Coplanar waveguides</subject><subject>Design automation</subject><subject>Etching</subject><subject>Foundries</subject><subject>Frequency</subject><subject>Insertion loss</subject><subject>Micromachining</subject><subject>Silicon</subject><subject>Transmission lines</subject><isbn>9780780336360</isbn><isbn>0780336364</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>1996</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNp9jrEKwjAYhAMiKNoX6JQXsKbGtM0oRdGhOFRwLH9jir80rSRF8e2N6OxxcBzfDUdIGLMojplcFucy35RRLGUSCclZJkYkkGnGvDlPeMImJHDuxrzWQvBVOiWHApXtDagrdvpCzac94aHpYKFzBp3DvqOth47WL6p6Y7RVCC3Ni2NJG6gtKhj8aE7GDbROB7-ckXC3PeX7BWqtq7tFA_ZVfX_xv_ANvkk9aQ</recordid><startdate>1996</startdate><enddate>1996</enddate><creator>Milanovic, V.</creator><creator>Gaitan, M.</creator><creator>Bowen, E.D.</creator><creator>Zaghloul, M.E.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>1996</creationdate><title>Micromachined microwave transmission lines by commercial CMOS fabrication</title><author>Milanovic, V. ; Gaitan, M. ; Bowen, E.D. ; Zaghloul, M.E.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-ieee_primary_5930853</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>1996</creationdate><topic>Coplanar transmission lines</topic><topic>Coplanar waveguides</topic><topic>Design automation</topic><topic>Etching</topic><topic>Foundries</topic><topic>Frequency</topic><topic>Insertion loss</topic><topic>Micromachining</topic><topic>Silicon</topic><topic>Transmission lines</topic><toplevel>online_resources</toplevel><creatorcontrib>Milanovic, V.</creatorcontrib><creatorcontrib>Gaitan, M.</creatorcontrib><creatorcontrib>Bowen, E.D.</creatorcontrib><creatorcontrib>Zaghloul, M.E.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Milanovic, V.</au><au>Gaitan, M.</au><au>Bowen, E.D.</au><au>Zaghloul, M.E.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Micromachined microwave transmission lines by commercial CMOS fabrication</atitle><btitle>Proceedings of the 39th Midwest Symposium on Circuits and Systems</btitle><stitle>MWSCAS</stitle><date>1996</date><risdate>1996</risdate><volume>3</volume><spage>1189</spage><epage>1192 vol.3</epage><pages>1189-1192 vol.3</pages><isbn>9780780336360</isbn><isbn>0780336364</isbn><abstract>Coplanar waveguides were designed and fabricated in standard CMOS with post-processing micromachining. Transmission line layouts were designed with commercial CAD tools, ICs were fabricated through a commercial CMOS foundry, and subsequently suspended by maskless top-side etching. Absence of the lossy silicon substrate after etching results in significantly improved insertion loss and dispersion characteristics, and phase velocity. Two types of layout are presented for different ranges of characteristic impedance. Measurements were performed at frequencies from 1 GHz to 40 GHz, before and after micromachining. These show improvement of loss characteristics of orders of magnitude. For the entire range of frequencies, for the 50 /spl Omega/ layout, losses do not exceed 4 dB/cm. Before etching, losses are as high as 38 dB/cm. Phase velocity in the micromachined transmission lines is close to that in free space.</abstract><pub>IEEE</pub><doi>10.1109/MWSCAS.1996.593085</doi></addata></record> |
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| identifier | ISBN: 9780780336360 |
| ispartof | Proceedings of the 39th Midwest Symposium on Circuits and Systems, 1996, Vol.3, p.1189-1192 vol.3 |
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| language | eng |
| recordid | cdi_ieee_primary_593085 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Coplanar transmission lines Coplanar waveguides Design automation Etching Foundries Frequency Insertion loss Micromachining Silicon Transmission lines |
| title | Micromachined microwave transmission lines by commercial CMOS fabrication |
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