MEMS optical acoustic sensors manufactured in laminates

MEMS optical acoustic sensors manufactured in laminates

Latest advancement in printed circuit board (PCB) technologies and discoveries of novel laminate materials has enabled a series of laminate MEMS devices to be designed, fabricated, and productized. To demonstrate the benefit in design and fabrication using the Laminate MEMS technology, we introduce...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Yang Zhang, Tsai, J., Li, G. P., Bachman, M.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Micromechanical devices
Optical device fabrication
Optical fiber sensors
Optical fibers
Waveguide lasers
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 235
container_issue
container_start_page 230
container_title
container_volume
creator Yang Zhang
Tsai, J.
Li, G. P.
Bachman, M.
description Latest advancement in printed circuit board (PCB) technologies and discoveries of novel laminate materials has enabled a series of laminate MEMS devices to be designed, fabricated, and productized. To demonstrate the benefit in design and fabrication using the Laminate MEMS technology, we introduce embedded MEMS optical sensors fabricated directly within PCB layers. Free-standing polymeric waveguides translate acoustic signals into optical ones with varied frequency response, directionality and dynamic range. Fiber optics components such as optical transmission lines, mirrors and beam-shaping lens are integrated in the same multi-layer electrical packages. Standard multi-mode, multichannel optical fiber connectors are adopted to seamlessly transfer optical signals to a linear photo detector array. Besides being low-cost and easy to integrate, this inline waveguide sensor design is completely EMI free, ideal for in-situ monitoring of acoustic emission from microelectronics packaging processes.
doi_str_mv 10.1109/ECTC.2011.5898518
format Conference Proceeding
fullrecord <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_5898518</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>5898518</ieee_id><sourcerecordid>5898518</sourcerecordid><originalsourceid>FETCH-LOGICAL-i175t-e2d62ad8f765fce4b702236756cf5f2832d9d7f19b34b633b382549eb7797a163</originalsourceid><addsrcrecordid>eNpFj8lqwzAURdUJ6qT9gNKNfsCunqYnLYtx2kJCFknXQbYlUPEQLHvRv2-hga7ugQMHLiFPwAoAZl-q8lgWnAEUylijwFyRFWjgRkqr2TXJuEDMFXJ98y_Q3pKMKW1zpZi4J6uUvhiTjIHJCO6q3YGO5zk2rqOuGZf0izT5IY1Tor0bluCaeZl8S-NAO9fHwc0-PZC74LrkHy-7Jp-b6li-59v920f5us0joJpzz1vNXWsCahUaL2tknAuNSjdBBW4Eb22LAWwtZK2FqIXhSlpfI1p0oMWaPP91o_f-dJ5i76bv0-W9-AF6wkkv</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>MEMS optical acoustic sensors manufactured in laminates</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Yang Zhang ; Tsai, J. ; Li, G. P. ; Bachman, M.</creator><creatorcontrib>Yang Zhang ; Tsai, J. ; Li, G. P. ; Bachman, M.</creatorcontrib><description>Latest advancement in printed circuit board (PCB) technologies and discoveries of novel laminate materials has enabled a series of laminate MEMS devices to be designed, fabricated, and productized. To demonstrate the benefit in design and fabrication using the Laminate MEMS technology, we introduce embedded MEMS optical sensors fabricated directly within PCB layers. Free-standing polymeric waveguides translate acoustic signals into optical ones with varied frequency response, directionality and dynamic range. Fiber optics components such as optical transmission lines, mirrors and beam-shaping lens are integrated in the same multi-layer electrical packages. Standard multi-mode, multichannel optical fiber connectors are adopted to seamlessly transfer optical signals to a linear photo detector array. Besides being low-cost and easy to integrate, this inline waveguide sensor design is completely EMI free, ideal for in-situ monitoring of acoustic emission from microelectronics packaging processes.</description><identifier>ISSN: 0569-5503</identifier><identifier>ISBN: 1612844979</identifier><identifier>ISBN: 9781612844978</identifier><identifier>EISSN: 2377-5726</identifier><identifier>EISBN: 1612844960</identifier><identifier>EISBN: 1612844987</identifier><identifier>EISBN: 9781612844961</identifier><identifier>EISBN: 9781612844985</identifier><identifier>DOI: 10.1109/ECTC.2011.5898518</identifier><language>eng</language><publisher>IEEE</publisher><subject>Micromechanical devices ; Optical device fabrication ; Optical fiber sensors ; Optical fibers ; Waveguide lasers</subject><ispartof>2011 IEEE 61st Electronic Components and Technology Conference (ECTC), 2011, p.230-235</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5898518$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2052,27902,54895</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5898518$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Yang Zhang</creatorcontrib><creatorcontrib>Tsai, J.</creatorcontrib><creatorcontrib>Li, G. P.</creatorcontrib><creatorcontrib>Bachman, M.</creatorcontrib><title>MEMS optical acoustic sensors manufactured in laminates</title><title>2011 IEEE 61st Electronic Components and Technology Conference (ECTC)</title><addtitle>ECTC</addtitle><description>Latest advancement in printed circuit board (PCB) technologies and discoveries of novel laminate materials has enabled a series of laminate MEMS devices to be designed, fabricated, and productized. To demonstrate the benefit in design and fabrication using the Laminate MEMS technology, we introduce embedded MEMS optical sensors fabricated directly within PCB layers. Free-standing polymeric waveguides translate acoustic signals into optical ones with varied frequency response, directionality and dynamic range. Fiber optics components such as optical transmission lines, mirrors and beam-shaping lens are integrated in the same multi-layer electrical packages. Standard multi-mode, multichannel optical fiber connectors are adopted to seamlessly transfer optical signals to a linear photo detector array. Besides being low-cost and easy to integrate, this inline waveguide sensor design is completely EMI free, ideal for in-situ monitoring of acoustic emission from microelectronics packaging processes.</description><subject>Micromechanical devices</subject><subject>Optical device fabrication</subject><subject>Optical fiber sensors</subject><subject>Optical fibers</subject><subject>Waveguide lasers</subject><issn>0569-5503</issn><issn>2377-5726</issn><isbn>1612844979</isbn><isbn>9781612844978</isbn><isbn>1612844960</isbn><isbn>1612844987</isbn><isbn>9781612844961</isbn><isbn>9781612844985</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2011</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNpFj8lqwzAURdUJ6qT9gNKNfsCunqYnLYtx2kJCFknXQbYlUPEQLHvRv2-hga7ugQMHLiFPwAoAZl-q8lgWnAEUylijwFyRFWjgRkqr2TXJuEDMFXJ98y_Q3pKMKW1zpZi4J6uUvhiTjIHJCO6q3YGO5zk2rqOuGZf0izT5IY1Tor0bluCaeZl8S-NAO9fHwc0-PZC74LrkHy-7Jp-b6li-59v920f5us0joJpzz1vNXWsCahUaL2tknAuNSjdBBW4Eb22LAWwtZK2FqIXhSlpfI1p0oMWaPP91o_f-dJ5i76bv0-W9-AF6wkkv</recordid><startdate>201105</startdate><enddate>201105</enddate><creator>Yang Zhang</creator><creator>Tsai, J.</creator><creator>Li, G. P.</creator><creator>Bachman, M.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>201105</creationdate><title>MEMS optical acoustic sensors manufactured in laminates</title><author>Yang Zhang ; Tsai, J. ; Li, G. P. ; Bachman, M.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-e2d62ad8f765fce4b702236756cf5f2832d9d7f19b34b633b382549eb7797a163</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2011</creationdate><topic>Micromechanical devices</topic><topic>Optical device fabrication</topic><topic>Optical fiber sensors</topic><topic>Optical fibers</topic><topic>Waveguide lasers</topic><toplevel>online_resources</toplevel><creatorcontrib>Yang Zhang</creatorcontrib><creatorcontrib>Tsai, J.</creatorcontrib><creatorcontrib>Li, G. P.</creatorcontrib><creatorcontrib>Bachman, M.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Yang Zhang</au><au>Tsai, J.</au><au>Li, G. P.</au><au>Bachman, M.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>MEMS optical acoustic sensors manufactured in laminates</atitle><btitle>2011 IEEE 61st Electronic Components and Technology Conference (ECTC)</btitle><stitle>ECTC</stitle><date>2011-05</date><risdate>2011</risdate><spage>230</spage><epage>235</epage><pages>230-235</pages><issn>0569-5503</issn><eissn>2377-5726</eissn><isbn>1612844979</isbn><isbn>9781612844978</isbn><eisbn>1612844960</eisbn><eisbn>1612844987</eisbn><eisbn>9781612844961</eisbn><eisbn>9781612844985</eisbn><abstract>Latest advancement in printed circuit board (PCB) technologies and discoveries of novel laminate materials has enabled a series of laminate MEMS devices to be designed, fabricated, and productized. To demonstrate the benefit in design and fabrication using the Laminate MEMS technology, we introduce embedded MEMS optical sensors fabricated directly within PCB layers. Free-standing polymeric waveguides translate acoustic signals into optical ones with varied frequency response, directionality and dynamic range. Fiber optics components such as optical transmission lines, mirrors and beam-shaping lens are integrated in the same multi-layer electrical packages. Standard multi-mode, multichannel optical fiber connectors are adopted to seamlessly transfer optical signals to a linear photo detector array. Besides being low-cost and easy to integrate, this inline waveguide sensor design is completely EMI free, ideal for in-situ monitoring of acoustic emission from microelectronics packaging processes.</abstract><pub>IEEE</pub><doi>10.1109/ECTC.2011.5898518</doi><tpages>6</tpages></addata></record>
fulltext fulltext_linktorsrc
identifier ISSN: 0569-5503
ispartof 2011 IEEE 61st Electronic Components and Technology Conference (ECTC), 2011, p.230-235
issn 0569-5503
2377-5726
language eng
recordid cdi_ieee_primary_5898518
source IEEE Electronic Library (IEL) Conference Proceedings
subjects Micromechanical devices
Optical device fabrication
Optical fiber sensors
Optical fibers
Waveguide lasers
title MEMS optical acoustic sensors manufactured in laminates
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-05T15%3A58%3A28IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=MEMS%20optical%20acoustic%20sensors%20manufactured%20in%20laminates&rft.btitle=2011%20IEEE%2061st%20Electronic%20Components%20and%20Technology%20Conference%20(ECTC)&rft.au=Yang%20Zhang&rft.date=2011-05&rft.spage=230&rft.epage=235&rft.pages=230-235&rft.issn=0569-5503&rft.eissn=2377-5726&rft.isbn=1612844979&rft.isbn_list=9781612844978&rft_id=info:doi/10.1109/ECTC.2011.5898518&rft_dat=%3Cieee_6IE%3E5898518%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&rft.eisbn=1612844960&rft.eisbn_list=1612844987&rft.eisbn_list=9781612844961&rft.eisbn_list=9781612844985&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=5898518&rfr_iscdi=true