Outdoor airborne contamination control for semiconductor manufacturing process

Semiconductor process can be adversely affected by airborne molecular contamination, which may arise from sources in the outdoor environment or from sources in the fab. In Taiwan, environment air pollutants could be carried in by seasonal wind from overseas or could arise from domestic agriculture a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Chia-ching Wan, Jang-Jung Lee, Lien-fang Wu
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Chemicals Steel
Online-Zugang:	Volltext bestellen
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