Self-Aligned Carbon Nanotube Thin-Film Transistors on Flexible Substrates With Novel Source-Drain Contact and Multilayer Metal Interconnection

This paper presents the development and characterization of self-aligned carbon nanotube thin-film transistors (CNT-TFT) on flexible substrates. The channel consisting of dense, aligned, 99% pure semiconducting single-walled CNT is deposited using the dip-coat technique on a sacrificial substrate an...

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Veröffentlicht in:	IEEE transactions on nanotechnology 2012-01, Vol.11 (1), p.44-50
Hauptverfasser:	Pham, D. T., Subbaraman, H., Chen, M. Y., Xiaochuan Xu, Chen, R. T.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Bend tests Carbon nanotube (CNT) Carbon nanotubes Channels Contact Design. Technologies. Operation analysis. Testing dip-coat technique Droplets Electronics Exact sciences and technology flexible electronics Ink Integrated circuit interconnections Integrated circuits Interconnection Logic gates Molecular electronics, nanoelectronics Multilayers Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Silver single-walled carbon nanotube (SWCNT) Substrates Testing, measurement, noise and reliability Thin films thin-film transistor (TFT) Transistors
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