Fabrication and characterization of 3D integrated 2 DOF Micromirror Arrays for excessive thermal loads

This paper reports a high fill-factor (>;90%), 2-dimensional analog micromirror array designed specifically for very high, optically induced thermal load applications. Each pixel can attain a mechanical DC rotation angle of ±4 degrees around any arbitrary axis with 170V excitation. The maximum te...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Ataman, Ç, Lani, S, Noell, W, Jutzi, F, Bayat, D, de Rooij, N
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Actuators Electrodes Micromirrors Silicon Springs Temperature measurement
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