Dual-confocal auto-focus sensing system in ultrafast laser application

A dual-confocal auto-focus sensing module for measuring defocusing positions of specimens in laser machining systems or inspecting devices is proposed. This sensing module can improve the detecting accuracy by analyzing and fitting signals from the difference between the dual optical paths, and mini...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Yung-Hsing Wang, Pin-Hao Hu, Yang-Cheng Lin, Shun-Sheng Ke, Yu-Hsiu Chang, Chien-Sheng Liu, Ji-Bin Horng
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Accuracy Adaptive optics Lasers Machining Optical reflection Optical sensors Ultrafast optics
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