Dual-confocal auto-focus sensing system in ultrafast laser application
A dual-confocal auto-focus sensing module for measuring defocusing positions of specimens in laser machining systems or inspecting devices is proposed. This sensing module can improve the detecting accuracy by analyzing and fitting signals from the difference between the dual optical paths, and mini...
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| creator | Yung-Hsing Wang Pin-Hao Hu Yang-Cheng Lin Shun-Sheng Ke Yu-Hsiu Chang Chien-Sheng Liu Ji-Bin Horng |
| description | A dual-confocal auto-focus sensing module for measuring defocusing positions of specimens in laser machining systems or inspecting devices is proposed. This sensing module can improve the detecting accuracy by analyzing and fitting signals from the difference between the dual optical paths, and miniaturize the optical apparatus with the superior integrated optical design. This auto-focusing module is especially integrated with the femtosecond laser machining system used to induce microstructures of silicon materials. The results of the simulations and the experiments demonstrate that the values of the positioning accuracy and the repeatability are both less than ±1.5μm with the measuring ranges of ±200μm. |
| doi_str_mv | 10.1109/ICSENS.2010.5690156 |
| format | Conference Proceeding |
| fullrecord | <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_5690156</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>5690156</ieee_id><sourcerecordid>5690156</sourcerecordid><originalsourceid>FETCH-LOGICAL-c225t-9b3cc49c64599f71970c3bde6b272425c337c0b4023f9bd2342819d03d2d73833</originalsourceid><addsrcrecordid>eNotkM1uwjAQhN0_qUB5Ai5-AdP1rh1njxWFFgm1B9ozchynShUSFCcH3r5I5fSN5pPmMEIsNCy1Bn7ervbrj_0S4VLYjEHb7EZMtUFjcp3l2a2Y4IWKEflOzNnlV-fA3ouJZgIFxPZRTFP6BUCwmE_E5nX0jQpdW3XBN9KPQ6cucUwyxTbV7Y9M5zTEo6xbOTZD7yufBtn4FHvpT6emDn6ou_ZJPFS-SXF-5Ux8b9Zfq3e1-3zbrl52KiDaQXFBIRgOmbHMldPsIFBRxqxAhwZtIHIBCgNIFRclksFccwlUYukoJ5qJxf9uHWM8nPr66Pvz4foH_QFPyU_h</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>Dual-confocal auto-focus sensing system in ultrafast laser application</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Yung-Hsing Wang ; Pin-Hao Hu ; Yang-Cheng Lin ; Shun-Sheng Ke ; Yu-Hsiu Chang ; Chien-Sheng Liu ; Ji-Bin Horng</creator><creatorcontrib>Yung-Hsing Wang ; Pin-Hao Hu ; Yang-Cheng Lin ; Shun-Sheng Ke ; Yu-Hsiu Chang ; Chien-Sheng Liu ; Ji-Bin Horng</creatorcontrib><description>A dual-confocal auto-focus sensing module for measuring defocusing positions of specimens in laser machining systems or inspecting devices is proposed. This sensing module can improve the detecting accuracy by analyzing and fitting signals from the difference between the dual optical paths, and miniaturize the optical apparatus with the superior integrated optical design. This auto-focusing module is especially integrated with the femtosecond laser machining system used to induce microstructures of silicon materials. The results of the simulations and the experiments demonstrate that the values of the positioning accuracy and the repeatability are both less than ±1.5μm with the measuring ranges of ±200μm.</description><identifier>ISSN: 1930-0395</identifier><identifier>ISBN: 9781424481705</identifier><identifier>ISBN: 1424481708</identifier><identifier>EISSN: 2168-9229</identifier><identifier>EISBN: 1424481686</identifier><identifier>EISBN: 9781424481682</identifier><identifier>EISBN: 9781424481699</identifier><identifier>EISBN: 1424481694</identifier><identifier>DOI: 10.1109/ICSENS.2010.5690156</identifier><language>eng</language><publisher>IEEE</publisher><subject>Accuracy ; Adaptive optics ; Lasers ; Machining ; Optical reflection ; Optical sensors ; Ultrafast optics</subject><ispartof>2010 IEEE Sensors, 2010, p.486-489</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c225t-9b3cc49c64599f71970c3bde6b272425c337c0b4023f9bd2342819d03d2d73833</citedby></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5690156$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2057,27924,54919</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5690156$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Yung-Hsing Wang</creatorcontrib><creatorcontrib>Pin-Hao Hu</creatorcontrib><creatorcontrib>Yang-Cheng Lin</creatorcontrib><creatorcontrib>Shun-Sheng Ke</creatorcontrib><creatorcontrib>Yu-Hsiu Chang</creatorcontrib><creatorcontrib>Chien-Sheng Liu</creatorcontrib><creatorcontrib>Ji-Bin Horng</creatorcontrib><title>Dual-confocal auto-focus sensing system in ultrafast laser application</title><title>2010 IEEE Sensors</title><addtitle>ICSENS</addtitle><description>A dual-confocal auto-focus sensing module for measuring defocusing positions of specimens in laser machining systems or inspecting devices is proposed. This sensing module can improve the detecting accuracy by analyzing and fitting signals from the difference between the dual optical paths, and miniaturize the optical apparatus with the superior integrated optical design. This auto-focusing module is especially integrated with the femtosecond laser machining system used to induce microstructures of silicon materials. The results of the simulations and the experiments demonstrate that the values of the positioning accuracy and the repeatability are both less than ±1.5μm with the measuring ranges of ±200μm.</description><subject>Accuracy</subject><subject>Adaptive optics</subject><subject>Lasers</subject><subject>Machining</subject><subject>Optical reflection</subject><subject>Optical sensors</subject><subject>Ultrafast optics</subject><issn>1930-0395</issn><issn>2168-9229</issn><isbn>9781424481705</isbn><isbn>1424481708</isbn><isbn>1424481686</isbn><isbn>9781424481682</isbn><isbn>9781424481699</isbn><isbn>1424481694</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2010</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotkM1uwjAQhN0_qUB5Ai5-AdP1rh1njxWFFgm1B9ozchynShUSFCcH3r5I5fSN5pPmMEIsNCy1Bn7ervbrj_0S4VLYjEHb7EZMtUFjcp3l2a2Y4IWKEflOzNnlV-fA3ouJZgIFxPZRTFP6BUCwmE_E5nX0jQpdW3XBN9KPQ6cucUwyxTbV7Y9M5zTEo6xbOTZD7yufBtn4FHvpT6emDn6ou_ZJPFS-SXF-5Ux8b9Zfq3e1-3zbrl52KiDaQXFBIRgOmbHMldPsIFBRxqxAhwZtIHIBCgNIFRclksFccwlUYukoJ5qJxf9uHWM8nPr66Pvz4foH_QFPyU_h</recordid><startdate>201011</startdate><enddate>201011</enddate><creator>Yung-Hsing Wang</creator><creator>Pin-Hao Hu</creator><creator>Yang-Cheng Lin</creator><creator>Shun-Sheng Ke</creator><creator>Yu-Hsiu Chang</creator><creator>Chien-Sheng Liu</creator><creator>Ji-Bin Horng</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>201011</creationdate><title>Dual-confocal auto-focus sensing system in ultrafast laser application</title><author>Yung-Hsing Wang ; Pin-Hao Hu ; Yang-Cheng Lin ; Shun-Sheng Ke ; Yu-Hsiu Chang ; Chien-Sheng Liu ; Ji-Bin Horng</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c225t-9b3cc49c64599f71970c3bde6b272425c337c0b4023f9bd2342819d03d2d73833</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2010</creationdate><topic>Accuracy</topic><topic>Adaptive optics</topic><topic>Lasers</topic><topic>Machining</topic><topic>Optical reflection</topic><topic>Optical sensors</topic><topic>Ultrafast optics</topic><toplevel>online_resources</toplevel><creatorcontrib>Yung-Hsing Wang</creatorcontrib><creatorcontrib>Pin-Hao Hu</creatorcontrib><creatorcontrib>Yang-Cheng Lin</creatorcontrib><creatorcontrib>Shun-Sheng Ke</creatorcontrib><creatorcontrib>Yu-Hsiu Chang</creatorcontrib><creatorcontrib>Chien-Sheng Liu</creatorcontrib><creatorcontrib>Ji-Bin Horng</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Yung-Hsing Wang</au><au>Pin-Hao Hu</au><au>Yang-Cheng Lin</au><au>Shun-Sheng Ke</au><au>Yu-Hsiu Chang</au><au>Chien-Sheng Liu</au><au>Ji-Bin Horng</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Dual-confocal auto-focus sensing system in ultrafast laser application</atitle><btitle>2010 IEEE Sensors</btitle><stitle>ICSENS</stitle><date>2010-11</date><risdate>2010</risdate><spage>486</spage><epage>489</epage><pages>486-489</pages><issn>1930-0395</issn><eissn>2168-9229</eissn><isbn>9781424481705</isbn><isbn>1424481708</isbn><eisbn>1424481686</eisbn><eisbn>9781424481682</eisbn><eisbn>9781424481699</eisbn><eisbn>1424481694</eisbn><abstract>A dual-confocal auto-focus sensing module for measuring defocusing positions of specimens in laser machining systems or inspecting devices is proposed. This sensing module can improve the detecting accuracy by analyzing and fitting signals from the difference between the dual optical paths, and miniaturize the optical apparatus with the superior integrated optical design. This auto-focusing module is especially integrated with the femtosecond laser machining system used to induce microstructures of silicon materials. The results of the simulations and the experiments demonstrate that the values of the positioning accuracy and the repeatability are both less than ±1.5μm with the measuring ranges of ±200μm.</abstract><pub>IEEE</pub><doi>10.1109/ICSENS.2010.5690156</doi><tpages>4</tpages></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 1930-0395 |
| ispartof | 2010 IEEE Sensors, 2010, p.486-489 |
| issn | 1930-0395 2168-9229 |
| language | eng |
| recordid | cdi_ieee_primary_5690156 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Accuracy Adaptive optics Lasers Machining Optical reflection Optical sensors Ultrafast optics |
| title | Dual-confocal auto-focus sensing system in ultrafast laser application |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-09T07%3A54%3A37IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Dual-confocal%20auto-focus%20sensing%20system%20in%20ultrafast%20laser%20application&rft.btitle=2010%20IEEE%20Sensors&rft.au=Yung-Hsing%20Wang&rft.date=2010-11&rft.spage=486&rft.epage=489&rft.pages=486-489&rft.issn=1930-0395&rft.eissn=2168-9229&rft.isbn=9781424481705&rft.isbn_list=1424481708&rft_id=info:doi/10.1109/ICSENS.2010.5690156&rft_dat=%3Cieee_6IE%3E5690156%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&rft.eisbn=1424481686&rft.eisbn_list=9781424481682&rft.eisbn_list=9781424481699&rft.eisbn_list=1424481694&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=5690156&rfr_iscdi=true |