Stress distribution under electroless nickel bumps extracted using arrays of 7×7 piezo-FETs

This paper presents CMOS-based, high density arrays of 7 × 7 n- and p-type piezoresistive field effect transistor (piezo-FET) based stress sensors with a pitch of 23 μm for extracting the distribution of the in-plane normal stress difference σ xx - σ yy and the in-plane shear stress σ xy under elect...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Lemke, Benjamin, Baskaran, Rajashree, Ganapathysubramanian, Shankar, Paul, Oliver
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Annealing Nickel Sensor arrays Stress Temperature measurement Temperature sensors
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