Inertial force sensor using optical Mach-Zehnder Interferometer and multi mode interferometer

In this paper, a novel inertial force sensor which uses a Mach-Zehnder Interferometer (MZI) type optical waveguide made of crystal silicon is proposed. In this sensor, one branched waveguide of the MZI have floating beam structure, and it is intersected with a cantilever for supporting a proof mass...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Suzuki, M, Kawai, G, Nishioka, K, Takahashi, T, Aoyagi, S, Amemiya, Y, Fukuyama, M, Yokoyama, S
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Optical device fabrication Optical fiber sensors Optical fibers Optical interferometry
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