Research of MEMS piezoresistive pressure sensor

A series of theoretical analysis about double island-beam structure sensor is discussed in this paper. The position for sitting resistances on the diaphragm, the resistance values and the width of the resistances are analyzed in detail. Utilizing finite-element method (FEM) and simulation software A...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Meng Yuan, Ping Liu, Bo She, Youliang Tang, Yan Xu
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Crystals Education MEMS sensor performance study resistance design Stress Stress measurement
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