Research of MEMS piezoresistive pressure sensor
A series of theoretical analysis about double island-beam structure sensor is discussed in this paper. The position for sitting resistances on the diaphragm, the resistance values and the width of the resistances are analyzed in detail. Utilizing finite-element method (FEM) and simulation software A...
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| creator | Meng Yuan Ping Liu Bo She Youliang Tang Yan Xu |
| description | A series of theoretical analysis about double island-beam structure sensor is discussed in this paper. The position for sitting resistances on the diaphragm, the resistance values and the width of the resistances are analyzed in detail. Utilizing finite-element method (FEM) and simulation software ANSYS, static and dynamics analysis and computer simulation are carried out for strain diaphragm of piezoresistive micro-pressure sensor. Analysis of simulation by ANSYS reveals that the structure sensor structure which we adopted in this paper has a high sensitivity, good linearity, and high anti-overload and so on. |
| doi_str_mv | 10.1109/FITME.2010.5655814 |
| format | Conference Proceeding |
| fullrecord | <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_5655814</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>5655814</ieee_id><sourcerecordid>5655814</sourcerecordid><originalsourceid>FETCH-LOGICAL-i90t-a847210fd51abd093b159347d529d1ef335db3d278ec91aa5bc9c9d6bd9c70043</originalsourceid><addsrcrecordid>eNpFj81KAzEUhSMiqLUvoJu8wLS5-Wlyl1KmWugg6OxLMrmDEXWGpAr69A604Nl859scOIzdglgACFxutm1TL6SY3KyMcaDP2DVoqTUKh-78Xyxcsnkpb2KKUdKhvGLLZyrkc_fKh543dfPCx0S_Q6aSyiF9Ex-nWr4y8UKfZcg37KL374XmJ85Yu6nb9WO1e3rYru93VUJxqLzTVoLoowEfokAVwKDSNhqJEahXysSgorSOOgTvTeiww7gKETsrhFYzdnecTUS0H3P68Plnf_qn_gCVykPK</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>Research of MEMS piezoresistive pressure sensor</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Meng Yuan ; Ping Liu ; Bo She ; Youliang Tang ; Yan Xu</creator><creatorcontrib>Meng Yuan ; Ping Liu ; Bo She ; Youliang Tang ; Yan Xu</creatorcontrib><description>A series of theoretical analysis about double island-beam structure sensor is discussed in this paper. The position for sitting resistances on the diaphragm, the resistance values and the width of the resistances are analyzed in detail. Utilizing finite-element method (FEM) and simulation software ANSYS, static and dynamics analysis and computer simulation are carried out for strain diaphragm of piezoresistive micro-pressure sensor. Analysis of simulation by ANSYS reveals that the structure sensor structure which we adopted in this paper has a high sensitivity, good linearity, and high anti-overload and so on.</description><identifier>ISBN: 1424490871</identifier><identifier>ISBN: 9781424490875</identifier><identifier>EISBN: 1424490898</identifier><identifier>EISBN: 9781424490899</identifier><identifier>EISBN: 9781424490905</identifier><identifier>EISBN: 1424490901</identifier><identifier>DOI: 10.1109/FITME.2010.5655814</identifier><language>eng</language><publisher>IEEE</publisher><subject>Crystals ; Education ; MEMS sensor ; performance study ; resistance design ; Stress ; Stress measurement</subject><ispartof>2010 International Conference on Future Information Technology and Management Engineering, 2010, Vol.1, p.536-539</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5655814$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2058,27925,54920</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5655814$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Meng Yuan</creatorcontrib><creatorcontrib>Ping Liu</creatorcontrib><creatorcontrib>Bo She</creatorcontrib><creatorcontrib>Youliang Tang</creatorcontrib><creatorcontrib>Yan Xu</creatorcontrib><title>Research of MEMS piezoresistive pressure sensor</title><title>2010 International Conference on Future Information Technology and Management Engineering</title><addtitle>FITME</addtitle><description>A series of theoretical analysis about double island-beam structure sensor is discussed in this paper. The position for sitting resistances on the diaphragm, the resistance values and the width of the resistances are analyzed in detail. Utilizing finite-element method (FEM) and simulation software ANSYS, static and dynamics analysis and computer simulation are carried out for strain diaphragm of piezoresistive micro-pressure sensor. Analysis of simulation by ANSYS reveals that the structure sensor structure which we adopted in this paper has a high sensitivity, good linearity, and high anti-overload and so on.</description><subject>Crystals</subject><subject>Education</subject><subject>MEMS sensor</subject><subject>performance study</subject><subject>resistance design</subject><subject>Stress</subject><subject>Stress measurement</subject><isbn>1424490871</isbn><isbn>9781424490875</isbn><isbn>1424490898</isbn><isbn>9781424490899</isbn><isbn>9781424490905</isbn><isbn>1424490901</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2010</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNpFj81KAzEUhSMiqLUvoJu8wLS5-Wlyl1KmWugg6OxLMrmDEXWGpAr69A604Nl859scOIzdglgACFxutm1TL6SY3KyMcaDP2DVoqTUKh-78Xyxcsnkpb2KKUdKhvGLLZyrkc_fKh543dfPCx0S_Q6aSyiF9Ex-nWr4y8UKfZcg37KL374XmJ85Yu6nb9WO1e3rYru93VUJxqLzTVoLoowEfokAVwKDSNhqJEahXysSgorSOOgTvTeiww7gKETsrhFYzdnecTUS0H3P68Plnf_qn_gCVykPK</recordid><startdate>201010</startdate><enddate>201010</enddate><creator>Meng Yuan</creator><creator>Ping Liu</creator><creator>Bo She</creator><creator>Youliang Tang</creator><creator>Yan Xu</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>201010</creationdate><title>Research of MEMS piezoresistive pressure sensor</title><author>Meng Yuan ; Ping Liu ; Bo She ; Youliang Tang ; Yan Xu</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i90t-a847210fd51abd093b159347d529d1ef335db3d278ec91aa5bc9c9d6bd9c70043</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2010</creationdate><topic>Crystals</topic><topic>Education</topic><topic>MEMS sensor</topic><topic>performance study</topic><topic>resistance design</topic><topic>Stress</topic><topic>Stress measurement</topic><toplevel>online_resources</toplevel><creatorcontrib>Meng Yuan</creatorcontrib><creatorcontrib>Ping Liu</creatorcontrib><creatorcontrib>Bo She</creatorcontrib><creatorcontrib>Youliang Tang</creatorcontrib><creatorcontrib>Yan Xu</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Meng Yuan</au><au>Ping Liu</au><au>Bo She</au><au>Youliang Tang</au><au>Yan Xu</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Research of MEMS piezoresistive pressure sensor</atitle><btitle>2010 International Conference on Future Information Technology and Management Engineering</btitle><stitle>FITME</stitle><date>2010-10</date><risdate>2010</risdate><volume>1</volume><spage>536</spage><epage>539</epage><pages>536-539</pages><isbn>1424490871</isbn><isbn>9781424490875</isbn><eisbn>1424490898</eisbn><eisbn>9781424490899</eisbn><eisbn>9781424490905</eisbn><eisbn>1424490901</eisbn><abstract>A series of theoretical analysis about double island-beam structure sensor is discussed in this paper. The position for sitting resistances on the diaphragm, the resistance values and the width of the resistances are analyzed in detail. Utilizing finite-element method (FEM) and simulation software ANSYS, static and dynamics analysis and computer simulation are carried out for strain diaphragm of piezoresistive micro-pressure sensor. Analysis of simulation by ANSYS reveals that the structure sensor structure which we adopted in this paper has a high sensitivity, good linearity, and high anti-overload and so on.</abstract><pub>IEEE</pub><doi>10.1109/FITME.2010.5655814</doi><tpages>4</tpages></addata></record> |
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| subjects | Crystals Education MEMS sensor performance study resistance design Stress Stress measurement |
| title | Research of MEMS piezoresistive pressure sensor |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-25T11%3A26%3A37IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Research%20of%20MEMS%20piezoresistive%20pressure%20sensor&rft.btitle=2010%20International%20Conference%20on%20Future%20Information%20Technology%20and%20Management%20Engineering&rft.au=Meng%20Yuan&rft.date=2010-10&rft.volume=1&rft.spage=536&rft.epage=539&rft.pages=536-539&rft.isbn=1424490871&rft.isbn_list=9781424490875&rft_id=info:doi/10.1109/FITME.2010.5655814&rft_dat=%3Cieee_6IE%3E5655814%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&rft.eisbn=1424490898&rft.eisbn_list=9781424490899&rft.eisbn_list=9781424490905&rft.eisbn_list=1424490901&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=5655814&rfr_iscdi=true |