Design of coarse-fine control system for wafer stage of lithography using PQ method

Wafer stage control system of step-scan lithography is a typical dual-stage system. Fine actuator ensures the high tracking precision and coarse actuator makes large-stroke movement to keep the fine actuator is not closed to saturation. PQ method is an effective technique for transforming a DISO sys...

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Bibliographische Detailangaben

Hauptverfasser:	Wu, Zhipeng, Chen, Xinglin, Hua, Wenhua, Wang, Jia
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Actuators Bandwidth Frequency control Magnetics Mathematical model Transfer functions
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