A MEMS electrostatic resonator for a fast-scan STM system
In this work, we report the development of a MEMS electrostatic resonator used as the actuator for a fast-scan STM system (FS-STM). The FS-STM requires an actuator which can oscillate with a relatively large amplitude (>3 μm) at a resonant frequency of larger than 10 kHz, which cannot be achieved...
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| creator | Hsin-Hung Liao Hsin-Hong Shen Bo-Ting Liao Yao-Joe Yang Yu-Chun Chen Woei-Wu Pai |
| description | In this work, we report the development of a MEMS electrostatic resonator used as the actuator for a fast-scan STM system (FS-STM). The FS-STM requires an actuator which can oscillate with a relatively large amplitude (>3 μm) at a resonant frequency of larger than 10 kHz, which cannot be achieved by using piezoelectric actuators. Under ambient pressure, the measurement results show that the oscillating amplitude of the proposed electrostatic actuator is about 3.1 μm at 11.8 kHz. This resonator will be used to generate the scanning motion of the tip in lateral direction, which might significantly improve the scanning rate of a typical radio-frequency STM. |
| doi_str_mv | 10.1109/NEMS.2010.5592458 |
| format | Conference Proceeding |
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| language | eng |
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| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Actuators Electrostatics Frequency measurement Laser beams Measurement by laser beam microelectromechanical devices Microresonators Resonant frequency scanning tunneling microscopy Structural beams |
| title | A MEMS electrostatic resonator for a fast-scan STM system |
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