Automated optical inspection method for MEMS fabrication

This paper presents a new optic inspection method for detection of defects in the layer of Micro Electro Mechanical Systems (MEMS) after the bonding process. In testing MEMS, a piezo driven vibrator is used to vibrate the MEMS device at its natural resonance frequency in vacuum environment. The ampl...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Yang, M, Castellani, M, Landot, R, Beyeler, F, Wang, Z, Pham, D T
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Grippers Inspection Micromechanical devices Pixel Resonant frequency Ultrafast optics Vibrations
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