Piezoresistive Microcantilevers From Ultrananocrystalline Diamond

This paper reports on the temperature-dependent electrical resistivity and piezoresistive characteristics of boron-doped ultrananocyrstalline diamond (UNCD) and the fabrication of piezoresistive microcantilevers using boron-doped and undoped UNCD. The devices consist of 1-μm-thick doped UNCD on eith...

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Veröffentlicht in:	Journal of microelectromechanical systems 2010-10, Vol.19 (5), p.1234-1242
Hauptverfasser:	Privorotskaya, Natalya L, Hongjun Zeng, Carlisle, John A, Bashir, Rashid, King, William P
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Diamond Diamond-like carbon Electrical resistance measurement Exact sciences and technology Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Metallurgy microcantilever Micromechanical devices and systems Physics Piezoresistance piezoresistivity Precision engineering, watch making Sensitivity Sensors Temperature measurement
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