Mass sensitivity evaluation of a Love wave sensor using the 3D Finite Element Method
The present paper describes a novel approach to evaluate the mass sensitivity of a Love wave (LW) sensor. A ZnO/XY LiNbO3 delay line based device with a sensing film was modeled and simulated applying the 3D- Finite Element Method (FEM). The radio frequency signal delays due to the thickness changes...
Gespeichert in:
| Hauptverfasser: | , , , |
|---|---|
| Format: | Tagungsbericht |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 231 |
|---|---|
| container_issue | |
| container_start_page | 228 |
| container_title | |
| container_volume | |
| creator | Rocha-Gaso, M.-I Fernández-Díaz, R Arnau-Vives, A March-Iborra, C |
| description | The present paper describes a novel approach to evaluate the mass sensitivity of a Love wave (LW) sensor. A ZnO/XY LiNbO3 delay line based device with a sensing film was modeled and simulated applying the 3D- Finite Element Method (FEM). The radio frequency signal delays due to the thickness changes induced to the sensing film were registered and measured at the output Interdigital Transducer (IDT). The time delays were associated with phase shifts to determine the phase sensitivity of the sensor. A phase sensitivity of 600 [cm 2 /g] was obtained, which is in good agreement with literature. |
| doi_str_mv | 10.1109/FREQ.2010.5556338 |
| format | Conference Proceeding |
| fullrecord | <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_5556338</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>5556338</ieee_id><sourcerecordid>5556338</sourcerecordid><originalsourceid>FETCH-LOGICAL-i175t-a7fa7ed0217194eb19e567055cfb7dbdb4066715514d58899a934bacffacf9e23</originalsourceid><addsrcrecordid>eNotkN1OwkAUhNcoiYg8gPFmX6C4Z397Lg22agIxGrwmW3oqa6A13QXD24uBi5nJl0zmYhi7AzEBEPhQfhTvEymOaIyxSuUXbIwuBy21tlqAvGQ3J1CI-RUbSiVdBgh6wIa5y6zRUrhrNo7xWwgBiGiNGbLF3MfII7UxpLAP6cBp7zc7n0LX8q7hns-6PfFff7T_VtfzXQztF09r4uqJl6ENiXixoS21ic8prbv6lg0av4k0PueIfZbFYvqSzd6eX6ePsyyAMynzrvGOaiHBAWqqAMlYJ4xZNZWrq7rSwloHxoCuTZ4jelS68qumOQpJqhG7P-0GIlr-9GHr-8PyfJD6Az8NVVg</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>Mass sensitivity evaluation of a Love wave sensor using the 3D Finite Element Method</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Rocha-Gaso, M.-I ; Fernández-Díaz, R ; Arnau-Vives, A ; March-Iborra, C</creator><creatorcontrib>Rocha-Gaso, M.-I ; Fernández-Díaz, R ; Arnau-Vives, A ; March-Iborra, C</creatorcontrib><description>The present paper describes a novel approach to evaluate the mass sensitivity of a Love wave (LW) sensor. A ZnO/XY LiNbO3 delay line based device with a sensing film was modeled and simulated applying the 3D- Finite Element Method (FEM). The radio frequency signal delays due to the thickness changes induced to the sensing film were registered and measured at the output Interdigital Transducer (IDT). The time delays were associated with phase shifts to determine the phase sensitivity of the sensor. A phase sensitivity of 600 [cm 2 /g] was obtained, which is in good agreement with literature.</description><identifier>ISSN: 2327-1914</identifier><identifier>ISBN: 1424463998</identifier><identifier>ISBN: 9781424463992</identifier><identifier>EISBN: 9781424464012</identifier><identifier>EISBN: 1424464005</identifier><identifier>EISBN: 1424464013</identifier><identifier>EISBN: 9781424464005</identifier><identifier>DOI: 10.1109/FREQ.2010.5556338</identifier><identifier>LCCN: 87-654207</identifier><language>eng</language><publisher>IEEE</publisher><subject>Computational modeling ; Fingers ; Finite element methods ; Sensitivity ; Sensors ; Surface acoustic wave devices</subject><ispartof>2010 IEEE International Frequency Control Symposium, 2010, p.228-231</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5556338$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,777,781,786,787,2052,27906,54901</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5556338$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Rocha-Gaso, M.-I</creatorcontrib><creatorcontrib>Fernández-Díaz, R</creatorcontrib><creatorcontrib>Arnau-Vives, A</creatorcontrib><creatorcontrib>March-Iborra, C</creatorcontrib><title>Mass sensitivity evaluation of a Love wave sensor using the 3D Finite Element Method</title><title>2010 IEEE International Frequency Control Symposium</title><addtitle>FREQ</addtitle><description>The present paper describes a novel approach to evaluate the mass sensitivity of a Love wave (LW) sensor. A ZnO/XY LiNbO3 delay line based device with a sensing film was modeled and simulated applying the 3D- Finite Element Method (FEM). The radio frequency signal delays due to the thickness changes induced to the sensing film were registered and measured at the output Interdigital Transducer (IDT). The time delays were associated with phase shifts to determine the phase sensitivity of the sensor. A phase sensitivity of 600 [cm 2 /g] was obtained, which is in good agreement with literature.</description><subject>Computational modeling</subject><subject>Fingers</subject><subject>Finite element methods</subject><subject>Sensitivity</subject><subject>Sensors</subject><subject>Surface acoustic wave devices</subject><issn>2327-1914</issn><isbn>1424463998</isbn><isbn>9781424463992</isbn><isbn>9781424464012</isbn><isbn>1424464005</isbn><isbn>1424464013</isbn><isbn>9781424464005</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2010</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotkN1OwkAUhNcoiYg8gPFmX6C4Z397Lg22agIxGrwmW3oqa6A13QXD24uBi5nJl0zmYhi7AzEBEPhQfhTvEymOaIyxSuUXbIwuBy21tlqAvGQ3J1CI-RUbSiVdBgh6wIa5y6zRUrhrNo7xWwgBiGiNGbLF3MfII7UxpLAP6cBp7zc7n0LX8q7hns-6PfFff7T_VtfzXQztF09r4uqJl6ENiXixoS21ic8prbv6lg0av4k0PueIfZbFYvqSzd6eX6ePsyyAMynzrvGOaiHBAWqqAMlYJ4xZNZWrq7rSwloHxoCuTZ4jelS68qumOQpJqhG7P-0GIlr-9GHr-8PyfJD6Az8NVVg</recordid><startdate>201006</startdate><enddate>201006</enddate><creator>Rocha-Gaso, M.-I</creator><creator>Fernández-Díaz, R</creator><creator>Arnau-Vives, A</creator><creator>March-Iborra, C</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>201006</creationdate><title>Mass sensitivity evaluation of a Love wave sensor using the 3D Finite Element Method</title><author>Rocha-Gaso, M.-I ; Fernández-Díaz, R ; Arnau-Vives, A ; March-Iborra, C</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-a7fa7ed0217194eb19e567055cfb7dbdb4066715514d58899a934bacffacf9e23</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2010</creationdate><topic>Computational modeling</topic><topic>Fingers</topic><topic>Finite element methods</topic><topic>Sensitivity</topic><topic>Sensors</topic><topic>Surface acoustic wave devices</topic><toplevel>online_resources</toplevel><creatorcontrib>Rocha-Gaso, M.-I</creatorcontrib><creatorcontrib>Fernández-Díaz, R</creatorcontrib><creatorcontrib>Arnau-Vives, A</creatorcontrib><creatorcontrib>March-Iborra, C</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Rocha-Gaso, M.-I</au><au>Fernández-Díaz, R</au><au>Arnau-Vives, A</au><au>March-Iborra, C</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Mass sensitivity evaluation of a Love wave sensor using the 3D Finite Element Method</atitle><btitle>2010 IEEE International Frequency Control Symposium</btitle><stitle>FREQ</stitle><date>2010-06</date><risdate>2010</risdate><spage>228</spage><epage>231</epage><pages>228-231</pages><issn>2327-1914</issn><isbn>1424463998</isbn><isbn>9781424463992</isbn><eisbn>9781424464012</eisbn><eisbn>1424464005</eisbn><eisbn>1424464013</eisbn><eisbn>9781424464005</eisbn><abstract>The present paper describes a novel approach to evaluate the mass sensitivity of a Love wave (LW) sensor. A ZnO/XY LiNbO3 delay line based device with a sensing film was modeled and simulated applying the 3D- Finite Element Method (FEM). The radio frequency signal delays due to the thickness changes induced to the sensing film were registered and measured at the output Interdigital Transducer (IDT). The time delays were associated with phase shifts to determine the phase sensitivity of the sensor. A phase sensitivity of 600 [cm 2 /g] was obtained, which is in good agreement with literature.</abstract><pub>IEEE</pub><doi>10.1109/FREQ.2010.5556338</doi><tpages>4</tpages></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 2327-1914 |
| ispartof | 2010 IEEE International Frequency Control Symposium, 2010, p.228-231 |
| issn | 2327-1914 |
| language | eng |
| recordid | cdi_ieee_primary_5556338 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Computational modeling Fingers Finite element methods Sensitivity Sensors Surface acoustic wave devices |
| title | Mass sensitivity evaluation of a Love wave sensor using the 3D Finite Element Method |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-19T20%3A36%3A38IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Mass%20sensitivity%20evaluation%20of%20a%20Love%20wave%20sensor%20using%20the%203D%20Finite%20Element%20Method&rft.btitle=2010%20IEEE%20International%20Frequency%20Control%20Symposium&rft.au=Rocha-Gaso,%20M.-I&rft.date=2010-06&rft.spage=228&rft.epage=231&rft.pages=228-231&rft.issn=2327-1914&rft.isbn=1424463998&rft.isbn_list=9781424463992&rft_id=info:doi/10.1109/FREQ.2010.5556338&rft_dat=%3Cieee_6IE%3E5556338%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&rft.eisbn=9781424464012&rft.eisbn_list=1424464005&rft.eisbn_list=1424464013&rft.eisbn_list=9781424464005&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=5556338&rfr_iscdi=true |