Thickness control by ion beam milling in acoustic resonator devices

In this paper, practical aspects of production worthy methods for film uniformity adjustment (trimming) used in manufacturing of Film Bulk Acoustic Resonator (FBAR) filters have been presented. Two-step trimming in conjunction with thickness "smoothing" technique control total thickness ra...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Mishin, Sergey, Oshmyansky, Yury, Bi, Frank
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Aluminum Film bulk acoustic resonators Ion beams Ion sources Surface treatment
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