Ultra-fast dual-stage vertical positioning for high performance SPMs

A major speed limitation of Scanning Probe Microscopes (SPMs) is the low vertical feedback bandwidth imposed by the mechanical scanner resonances. The vertical feedback controller regulates the tip-sample interaction in application modes such as constant-current scanning tunneling microscopy and con...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Fleming, A J, Kenton, B J, Leang, K K
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Actuators Adaptive control Atomic force microscopy Bandwidth Control systems Force feedback Resonance Resonant frequency Scanning probe microscopy Tunneling
Online-Zugang:	Volltext bestellen
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