Novel fingerprint scanning arrays using polysilicon TFT's on glass and polymer substrates
Novel fingerprint scanning arrays based upon capacitance sensing have been made. Each sensor element consists of a capacitor electrode and two poly-Si thin film transistors for addressing and read out. The devices were fabricated on glass, polyimide and polyethersulphone substrates using a low tempe...
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Veröffentlicht in: | IEEE electron device letters 1997-01, Vol.18 (1), p.19-20 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Novel fingerprint scanning arrays based upon capacitance sensing have been made. Each sensor element consists of a capacitor electrode and two poly-Si thin film transistors for addressing and read out. The devices were fabricated on glass, polyimide and polyethersulphone substrates using a low temperature ( |
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ISSN: | 0741-3106 1558-0563 |
DOI: | 10.1109/55.553063 |