RF plasma processing for removal of contaminants in a high voltage anode-cathode gap

Summary form only given, as follows. Experiments at Sandia National Lab have shown the importance of removing contaminants from ion diodes to reduce parasitic losses. At Michigan, experiments are underway to study the technique of RF plasma processing as a means of cleaning contaminants from the ano...

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Hauptverfasser: Rintamaki, J.I., Gilgenbach, R.M., Hochman, J.M., Jaynes, R.L., Lash, J.S., Cohen, W.E., Menge, P.R., Cuneo, M.E.
Format: Tagungsbericht
Sprache:eng
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