Multiphysics modeling and design of ultralarge multiwafer MOVPE reactor for group III-nitride light emitting diodes

A multiphysics modeling and design has been performed for the world's largest Metal Organic Vapor Phase Epitaxy (MOVPE) reactor by combining Theory of Inventive Problem Solving (TRIZ) for concept design, Design for Six Sigma (DFSS) for shape optimization, and Computer-Aided Engineering (CAE) simulations of multi-scale from atomic to macro scales. Numerical simulations considering gas phase chemical reactions and surface chemistry have been thoroughly verified by comparing with experimental measurements from various MOVPE reactors. As a preliminary study, two transparent mock-up models for the ultra-large MOVPE reactor were made in real scale and their internal flow fields were measured by laser Doppler velocimetry (LDV). A RF induction heater was also simulated by coupling the thermo-fluid field and electro-magnetic field together. Since the MOVPE reactor was manufactured, numerous tests for high-temperature reliability and temperature uniformity have repeatedly been conducted. Consequently, these multidisciplinary approaches have been successfully applied to develop the ultralarge MOVPE reactor for group III-nitride light emitting diode (LED).