High-cyclic fatigue experiments of single crystal silicon in an oxygen-free environment

We report on the first study of fatigue in single crystal silicon MEMS resonators within an extremely clean and controlled environment using the `epi-seal' encapsulation technology. This packaging technology provides a unique opportunity to investigate controversial issues in silicon fatigue si...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Yoneoka, Shingo, Yu Qiao Qu, Wang, Shasha, Messana, Matthew W, Graham, Andrew B, Salvia, James, Bongsang Kim, Melamud, Renata, Bahl, Gaurav, Kenny, Thomas W
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Circuit testing Encapsulation Fatigue Humidity Micromechanical devices Packaging Resonant frequency Silicon Stress Temperature
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