Thermal and topological characterization of Au, Ru and Au/Ru based MEMS contacts using nanoindenter

Thermal and topological characterization of Au, Ru and Au/Ru based MEMS contacts using nanoindenter

This paper reports the comparisons between several pairs of contact materials for micro switches. This study is done with a new methodology using a commercial nanoindenter coupled with electrical stimulation of test vehicles specially designed. The stability of the contact resistance, when the conta...

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Hauptverfasser: Broue, Adrien, Dhennin, Jeremie, Courtade, Frederic, Charvet, Pierre-Louis, Pons, Patrick, Lafontan, Xavier, Plana, Robert
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Micromechanical devices
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creator Broue, Adrien
Dhennin, Jeremie
Courtade, Frederic
Charvet, Pierre-Louis
Pons, Patrick
Lafontan, Xavier
Plana, Robert
description This paper reports the comparisons between several pairs of contact materials for micro switches. This study is done with a new methodology using a commercial nanoindenter coupled with electrical stimulation of test vehicles specially designed. The stability of the contact resistance, when the contact force increases, is studied for contact pairs of soft (Au/Au contact), harder (Ru/Ru contact) and mixed material configuration (Au/Ru contact). An enhanced stability of the bimetallic contact Au/Ru was demonstrated considering the sensitivity to power increase, and related topological modifications of the contact surfaces.
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Micromechanical devices
title Thermal and topological characterization of Au, Ru and Au/Ru based MEMS contacts using nanoindenter
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