A flexible capacitive micromachined ultrasonic transducer (CMUT) array with increased effective capacitance from concave bottom electrodes for ultrasonic imaging applications

A flexible capacitive micromachined ultrasonic transducer (CMUT) array with increased effective capacitance from concave bottom electrodes is proposed for ultrasonic imaging. A CMUT can transmit and receive ultrasound by vibrating its membrane like a drum. DC bias is applied to bring the membrane cl...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Ching-Hsiang Cheng, Chen Chao, Xiaomei Shi, Leung, Wallace
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Biomembranes Capacitive Micromachined Ultrasonic Transducer CMUT Concave Bottom Electrode Effective Capacitance Electrodes Fabrication Parasitic capacitance Polymers Silicon Temperature Ultrasonic imaging Ultrasonic transducer arrays Ultrasonic transducers
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