Thermally Actuated Omnidirectional Walking Microrobot

We describe a walking microrobot that is propelled by cilialike thermal bimorph actuator arrays. The robot consists of two actuator array chips, each having an 8 × 8 array of "motion pixels," which are composed of four orthogonally oriented cilia. Each group of unidirectional cilia is cont...

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Veröffentlicht in:	Journal of microelectromechanical systems 2010-06, Vol.19 (3), p.433-442
Hauptverfasser:	Erdem, E Yegân, Yu-Ming Chen, Mohebbi, Matthew, Suh, John W, Kovacs, Gregory, Darling, Robert B, Böhringer, Karl F
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuator array Actuators Applied sciences Arrays bimorph Chips cilia Computer science control theory systems Control theory. Systems Electrostatics Energy consumption Exact sciences and technology Fabrication Instruments, apparatus, components and techniques common to several branches of physics and astronomy Legged locomotion Mathematical analysis Mechanical engineering Mechanical instruments, equipment and techniques Microelectromechanical systems microelectromechanical systems (MEMS) Micromechanical devices Micromechanical devices and systems microrobot Microrobots Motion control Physics Robotics Robots Strategy Studies thermal actuators Walking
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