Novel applications of porous silicon
Porous silicon is best known for its applications in the oxide isolation of silicon integrated circuits. However, porous silicon is a very versatile material and its unique properties are being researched for a surprising range of applications. These include use as a substrate for epitaxial growth,...
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| description | Porous silicon is best known for its applications in the oxide isolation of silicon integrated circuits. However, porous silicon is a very versatile material and its unique properties are being researched for a surprising range of applications. These include use as a substrate for epitaxial growth, for the production of ``smart'' dielectrics, for the location of defects in other silicon-on-insulator materials, for the producion of sensors, for conversion to metal and for the emission of visible light. These and others are described. |
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However, porous silicon is a very versatile material and its unique properties are being researched for a surprising range of applications. These include use as a substrate for epitaxial growth, for the production of ``smart'' dielectrics, for the location of defects in other silicon-on-insulator materials, for the producion of sensors, for conversion to metal and for the emission of visible light. 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However, porous silicon is a very versatile material and its unique properties are being researched for a surprising range of applications. These include use as a substrate for epitaxial growth, for the production of ``smart'' dielectrics, for the location of defects in other silicon-on-insulator materials, for the producion of sensors, for conversion to metal and for the emission of visible light. 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However, porous silicon is a very versatile material and its unique properties are being researched for a surprising range of applications. These include use as a substrate for epitaxial growth, for the production of ``smart'' dielectrics, for the location of defects in other silicon-on-insulator materials, for the producion of sensors, for conversion to metal and for the emission of visible light. These and others are described.</abstract><pub>IEEE</pub><tpages>6</tpages></addata></record> |
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| identifier | ISBN: 9780750300650 |
| ispartof | ESSDERC '90: 20th European Solid State Device Research Conference, 1990, p.613-618 |
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| language | eng |
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| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Physics Silicon Solid state circuits |
| title | Novel applications of porous silicon |
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