Study on the changes of surface property of grown C-TiO2 films by O2 plasma treatment

In the previous work, we reported that TiO 2 nanorods could be successfully grown on Ta substrates using titanium tetra isopropoxide (TTIP) as a single precursor without any carriers or bubbling gases. In the mean time, columnar-structured C doped TiO 2 was grown on glass substrates by MOCVD method. For change of surface properties, grown columnar-structured C-TiO 2 was treated by O 2 plasma. After O 2 plasma treatment, the surface property of grown columnar-structured C-TiO 2 changed from hydrophobic surface to super hydrophilic surface. For determination of this mechanism, scanning electron microscopy (SEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), FT-IR spectroscopy, and contact angle analyzer were employed.