NEMS applications of graphene
Graphene, which consists of a single atomic sheet of graphene, possesses high electronic mobility, and excellent mechanical properties, making it an ideal candidate for nanoelectromechanical (NEMS) applications, including sensing and signal processing. Toward these applications, we have measured the...
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| creator | Changyao Chen Rosenblatt, S. Bolotin, K.I. Kim, P. Kymissis, I. Stormer, H.L. Heinz, T.F. Hone, J. |
| description | Graphene, which consists of a single atomic sheet of graphene, possesses high electronic mobility, and excellent mechanical properties, making it an ideal candidate for nanoelectromechanical (NEMS) applications, including sensing and signal processing. Toward these applications, we have measured the mechanical properties of graphene sheets and demonstrated fabrication and electrical readout of monolayer graphene NEMS that show vibrational resonances in the MHz range. The dependence of the resonant frequency on applied gate voltage yields the mass density and built-in strain. Upon addition of mass, we observe changes in both the density and the strain, indicating that adsorbates impart tension to the graphene. The quality factor increases monotonically with decreasing temperature and reaches ~104 at 5 K. |
| doi_str_mv | 10.1109/IEDM.2009.5424374 |
| format | Conference Proceeding |
| fullrecord | <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_5424374</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>5424374</ieee_id><sourcerecordid>5424374</sourcerecordid><originalsourceid>FETCH-LOGICAL-i90t-3ea9246de5c5924faf4e0eda924a617abfd4a46b6e86a77820bd81a926787b723</originalsourceid><addsrcrecordid>eNotj81Kw0AUha8_BdPaBxAR8gKT3jtz528pbbSFVhd24a5MmolGahuSbnx7I2Z1Ps4HBw7AHWFGhH62yhebTCL6TLNkZfkCxtQTa8NIl5BI0kYg2fcrmHrrBqc8XkOCZJQgT24EiSNhWErHNzDuui9EabXXCTy85Ju3NDTNod6Hc306dumpSj_a0HzGY7yFURUOXZwOOYHtU76dL8X69Xk1f1yL2uNZqBi8ZFNGvdc9VKHiiLH8K4MhG4qq5MCmMNGZYK2TWJSOem2ss4WVagL3_7N1jHHXtPV3aH92w2P1C2lAQe0</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>NEMS applications of graphene</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Changyao Chen ; Rosenblatt, S. ; Bolotin, K.I. ; Kim, P. ; Kymissis, I. ; Stormer, H.L. ; Heinz, T.F. ; Hone, J.</creator><creatorcontrib>Changyao Chen ; Rosenblatt, S. ; Bolotin, K.I. ; Kim, P. ; Kymissis, I. ; Stormer, H.L. ; Heinz, T.F. ; Hone, J.</creatorcontrib><description>Graphene, which consists of a single atomic sheet of graphene, possesses high electronic mobility, and excellent mechanical properties, making it an ideal candidate for nanoelectromechanical (NEMS) applications, including sensing and signal processing. Toward these applications, we have measured the mechanical properties of graphene sheets and demonstrated fabrication and electrical readout of monolayer graphene NEMS that show vibrational resonances in the MHz range. The dependence of the resonant frequency on applied gate voltage yields the mass density and built-in strain. Upon addition of mass, we observe changes in both the density and the strain, indicating that adsorbates impart tension to the graphene. The quality factor increases monotonically with decreasing temperature and reaches ~104 at 5 K.</description><identifier>ISSN: 0163-1918</identifier><identifier>ISBN: 9781424456390</identifier><identifier>ISBN: 1424456398</identifier><identifier>EISSN: 2156-017X</identifier><identifier>EISBN: 1424456401</identifier><identifier>EISBN: 9781424456413</identifier><identifier>EISBN: 9781424456406</identifier><identifier>EISBN: 142445641X</identifier><identifier>DOI: 10.1109/IEDM.2009.5424374</identifier><identifier>LCCN: 81-642284</identifier><language>eng</language><publisher>IEEE</publisher><subject>Atomic layer deposition ; Atomic measurements ; Capacitive sensors ; Electric variables measurement ; Fabrication ; Mechanical factors ; Mechanical variables measurement ; Nanoelectromechanical systems ; Signal processing ; Vibration measurement</subject><ispartof>2009 IEEE International Electron Devices Meeting (IEDM), 2009, p.1-4</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5424374$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2058,27925,54920</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5424374$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Changyao Chen</creatorcontrib><creatorcontrib>Rosenblatt, S.</creatorcontrib><creatorcontrib>Bolotin, K.I.</creatorcontrib><creatorcontrib>Kim, P.</creatorcontrib><creatorcontrib>Kymissis, I.</creatorcontrib><creatorcontrib>Stormer, H.L.</creatorcontrib><creatorcontrib>Heinz, T.F.</creatorcontrib><creatorcontrib>Hone, J.</creatorcontrib><title>NEMS applications of graphene</title><title>2009 IEEE International Electron Devices Meeting (IEDM)</title><addtitle>IEDM</addtitle><description>Graphene, which consists of a single atomic sheet of graphene, possesses high electronic mobility, and excellent mechanical properties, making it an ideal candidate for nanoelectromechanical (NEMS) applications, including sensing and signal processing. Toward these applications, we have measured the mechanical properties of graphene sheets and demonstrated fabrication and electrical readout of monolayer graphene NEMS that show vibrational resonances in the MHz range. The dependence of the resonant frequency on applied gate voltage yields the mass density and built-in strain. Upon addition of mass, we observe changes in both the density and the strain, indicating that adsorbates impart tension to the graphene. The quality factor increases monotonically with decreasing temperature and reaches ~104 at 5 K.</description><subject>Atomic layer deposition</subject><subject>Atomic measurements</subject><subject>Capacitive sensors</subject><subject>Electric variables measurement</subject><subject>Fabrication</subject><subject>Mechanical factors</subject><subject>Mechanical variables measurement</subject><subject>Nanoelectromechanical systems</subject><subject>Signal processing</subject><subject>Vibration measurement</subject><issn>0163-1918</issn><issn>2156-017X</issn><isbn>9781424456390</isbn><isbn>1424456398</isbn><isbn>1424456401</isbn><isbn>9781424456413</isbn><isbn>9781424456406</isbn><isbn>142445641X</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2009</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotj81Kw0AUha8_BdPaBxAR8gKT3jtz528pbbSFVhd24a5MmolGahuSbnx7I2Z1Ps4HBw7AHWFGhH62yhebTCL6TLNkZfkCxtQTa8NIl5BI0kYg2fcrmHrrBqc8XkOCZJQgT24EiSNhWErHNzDuui9EabXXCTy85Ju3NDTNod6Hc306dumpSj_a0HzGY7yFURUOXZwOOYHtU76dL8X69Xk1f1yL2uNZqBi8ZFNGvdc9VKHiiLH8K4MhG4qq5MCmMNGZYK2TWJSOem2ss4WVagL3_7N1jHHXtPV3aH92w2P1C2lAQe0</recordid><startdate>200912</startdate><enddate>200912</enddate><creator>Changyao Chen</creator><creator>Rosenblatt, S.</creator><creator>Bolotin, K.I.</creator><creator>Kim, P.</creator><creator>Kymissis, I.</creator><creator>Stormer, H.L.</creator><creator>Heinz, T.F.</creator><creator>Hone, J.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>200912</creationdate><title>NEMS applications of graphene</title><author>Changyao Chen ; Rosenblatt, S. ; Bolotin, K.I. ; Kim, P. ; Kymissis, I. ; Stormer, H.L. ; Heinz, T.F. ; Hone, J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i90t-3ea9246de5c5924faf4e0eda924a617abfd4a46b6e86a77820bd81a926787b723</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2009</creationdate><topic>Atomic layer deposition</topic><topic>Atomic measurements</topic><topic>Capacitive sensors</topic><topic>Electric variables measurement</topic><topic>Fabrication</topic><topic>Mechanical factors</topic><topic>Mechanical variables measurement</topic><topic>Nanoelectromechanical systems</topic><topic>Signal processing</topic><topic>Vibration measurement</topic><toplevel>online_resources</toplevel><creatorcontrib>Changyao Chen</creatorcontrib><creatorcontrib>Rosenblatt, S.</creatorcontrib><creatorcontrib>Bolotin, K.I.</creatorcontrib><creatorcontrib>Kim, P.</creatorcontrib><creatorcontrib>Kymissis, I.</creatorcontrib><creatorcontrib>Stormer, H.L.</creatorcontrib><creatorcontrib>Heinz, T.F.</creatorcontrib><creatorcontrib>Hone, J.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library Online</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Changyao Chen</au><au>Rosenblatt, S.</au><au>Bolotin, K.I.</au><au>Kim, P.</au><au>Kymissis, I.</au><au>Stormer, H.L.</au><au>Heinz, T.F.</au><au>Hone, J.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>NEMS applications of graphene</atitle><btitle>2009 IEEE International Electron Devices Meeting (IEDM)</btitle><stitle>IEDM</stitle><date>2009-12</date><risdate>2009</risdate><spage>1</spage><epage>4</epage><pages>1-4</pages><issn>0163-1918</issn><eissn>2156-017X</eissn><isbn>9781424456390</isbn><isbn>1424456398</isbn><eisbn>1424456401</eisbn><eisbn>9781424456413</eisbn><eisbn>9781424456406</eisbn><eisbn>142445641X</eisbn><abstract>Graphene, which consists of a single atomic sheet of graphene, possesses high electronic mobility, and excellent mechanical properties, making it an ideal candidate for nanoelectromechanical (NEMS) applications, including sensing and signal processing. Toward these applications, we have measured the mechanical properties of graphene sheets and demonstrated fabrication and electrical readout of monolayer graphene NEMS that show vibrational resonances in the MHz range. The dependence of the resonant frequency on applied gate voltage yields the mass density and built-in strain. Upon addition of mass, we observe changes in both the density and the strain, indicating that adsorbates impart tension to the graphene. The quality factor increases monotonically with decreasing temperature and reaches ~104 at 5 K.</abstract><pub>IEEE</pub><doi>10.1109/IEDM.2009.5424374</doi><tpages>4</tpages></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 0163-1918 |
| ispartof | 2009 IEEE International Electron Devices Meeting (IEDM), 2009, p.1-4 |
| issn | 0163-1918 2156-017X |
| language | eng |
| recordid | cdi_ieee_primary_5424374 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Atomic layer deposition Atomic measurements Capacitive sensors Electric variables measurement Fabrication Mechanical factors Mechanical variables measurement Nanoelectromechanical systems Signal processing Vibration measurement |
| title | NEMS applications of graphene |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-07T18%3A19%3A21IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=NEMS%20applications%20of%20graphene&rft.btitle=2009%20IEEE%20International%20Electron%20Devices%20Meeting%20(IEDM)&rft.au=Changyao%20Chen&rft.date=2009-12&rft.spage=1&rft.epage=4&rft.pages=1-4&rft.issn=0163-1918&rft.eissn=2156-017X&rft.isbn=9781424456390&rft.isbn_list=1424456398&rft_id=info:doi/10.1109/IEDM.2009.5424374&rft_dat=%3Cieee_6IE%3E5424374%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&rft.eisbn=1424456401&rft.eisbn_list=9781424456413&rft.eisbn_list=9781424456406&rft.eisbn_list=142445641X&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=5424374&rfr_iscdi=true |