SAW-properties of langasite at high temperatures: Measurement and analysis
The measurement range of temperature using SAW-devices is depending on the substrate material used in the measurements. This dependence is related to the temperature point, where the substrate loses its piezoelectric properties. This occurs by the SAW-materials such as quartz and lithium niobate at...
Gespeichert in:
| Hauptverfasser: | , , , , , |
|---|---|
| Format: | Tagungsbericht |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 4 |
|---|---|
| container_issue | |
| container_start_page | 1 |
| container_title | |
| container_volume | |
| creator | Shrena, I. Eisele, D. Mayer, E. Reindl, L.M. Bardong, J. Schmitt, M. |
| description | The measurement range of temperature using SAW-devices is depending on the substrate material used in the measurements. This dependence is related to the temperature point, where the substrate loses its piezoelectric properties. This occurs by the SAW-materials such as quartz and lithium niobate at about 570°C or 350°C, respectively. The piezoelectric material langasite (La3Ga5SiO14) has a thermodynamically stable phase and do not lose its piezoelectric properties up to its melting point at about 1470 °C and can be used for SAW devices at high temperatures. This paper presents the measurements of acoustical parameters of langasite up to 750°C. Langasite is used as substrate in the measurements with Euler angles (0°, 138.5°, 26.6°) and two different platinum (Pt) layer heights (45 nm and 75 nm) top of a zirconium (Zr) adhesion layer (4 nm). The investigated acoustic properties of langasite are group and phase velocity, propagation loss, and electromechanical coupling coefficient as functions of temperature. The measured data is analyzed using a special signal processing algorithm to obtain these acoustic properties of the Langasite. |
| doi_str_mv | 10.1109/ICSCS.2009.5414173 |
| format | Conference Proceeding |
| fullrecord | <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_5414173</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>5414173</ieee_id><sourcerecordid>5414173</sourcerecordid><originalsourceid>FETCH-LOGICAL-i90t-a3f9bab1467c873b11043aad4af312e0a64fb64637799d6060063cd49b07e3a83</originalsourceid><addsrcrecordid>eNpFUNFKw0AQPJGCtvYH9OV-IHEvt73L-VaC1krFhxZ8LJtm0540acidD_17IxZcGGaXGQZmhbhXkCoF7nFZrIt1mgG4dIYKldVXYqwwQ0Ttcnf9f1gYifGv0UFmc3MjpiF8wTA4y5zOb8Xbev6ZdP2p4z56DvJUyyO1ewo-sqQoD35_kJGbQaf43XN4ku9MYdgabqOkthpAx3Pw4U6MajoGnl54IjYvz5viNVl9LJbFfJV4BzEhXbuSSoXG7nKry6EQaqIKqdYqYyCDdWnQaGudqwwYAKN3FboSLGvK9UQ8_MV6Zt52vW-oP28vf9A__rRPSg</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>SAW-properties of langasite at high temperatures: Measurement and analysis</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Shrena, I. ; Eisele, D. ; Mayer, E. ; Reindl, L.M. ; Bardong, J. ; Schmitt, M.</creator><creatorcontrib>Shrena, I. ; Eisele, D. ; Mayer, E. ; Reindl, L.M. ; Bardong, J. ; Schmitt, M.</creatorcontrib><description>The measurement range of temperature using SAW-devices is depending on the substrate material used in the measurements. This dependence is related to the temperature point, where the substrate loses its piezoelectric properties. This occurs by the SAW-materials such as quartz and lithium niobate at about 570°C or 350°C, respectively. The piezoelectric material langasite (La3Ga5SiO14) has a thermodynamically stable phase and do not lose its piezoelectric properties up to its melting point at about 1470 °C and can be used for SAW devices at high temperatures. This paper presents the measurements of acoustical parameters of langasite up to 750°C. Langasite is used as substrate in the measurements with Euler angles (0°, 138.5°, 26.6°) and two different platinum (Pt) layer heights (45 nm and 75 nm) top of a zirconium (Zr) adhesion layer (4 nm). The investigated acoustic properties of langasite are group and phase velocity, propagation loss, and electromechanical coupling coefficient as functions of temperature. The measured data is analyzed using a special signal processing algorithm to obtain these acoustic properties of the Langasite.</description><identifier>ISBN: 1424443970</identifier><identifier>ISBN: 9781424443970</identifier><identifier>EISBN: 1424443989</identifier><identifier>EISBN: 9781424443987</identifier><identifier>DOI: 10.1109/ICSCS.2009.5414173</identifier><identifier>LCCN: 2009902786</identifier><language>eng</language><publisher>IEEE</publisher><subject>Acoustic measurements ; Acoustical parameters ; Goniometers ; high temperature properties ; langasite ; Lithium niobate ; Piezoelectric devices ; Piezoelectric materials ; SAW ; Substrate ; Surface acoustic wave devices ; Temperature dependence ; Temperature distribution ; Temperature measurement ; Zirconium</subject><ispartof>2009 3rd International Conference on Signals, Circuits and Systems (SCS), 2009, p.1-4</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5414173$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2052,27902,54895</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5414173$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Shrena, I.</creatorcontrib><creatorcontrib>Eisele, D.</creatorcontrib><creatorcontrib>Mayer, E.</creatorcontrib><creatorcontrib>Reindl, L.M.</creatorcontrib><creatorcontrib>Bardong, J.</creatorcontrib><creatorcontrib>Schmitt, M.</creatorcontrib><title>SAW-properties of langasite at high temperatures: Measurement and analysis</title><title>2009 3rd International Conference on Signals, Circuits and Systems (SCS)</title><addtitle>ICSCS</addtitle><description>The measurement range of temperature using SAW-devices is depending on the substrate material used in the measurements. This dependence is related to the temperature point, where the substrate loses its piezoelectric properties. This occurs by the SAW-materials such as quartz and lithium niobate at about 570°C or 350°C, respectively. The piezoelectric material langasite (La3Ga5SiO14) has a thermodynamically stable phase and do not lose its piezoelectric properties up to its melting point at about 1470 °C and can be used for SAW devices at high temperatures. This paper presents the measurements of acoustical parameters of langasite up to 750°C. Langasite is used as substrate in the measurements with Euler angles (0°, 138.5°, 26.6°) and two different platinum (Pt) layer heights (45 nm and 75 nm) top of a zirconium (Zr) adhesion layer (4 nm). The investigated acoustic properties of langasite are group and phase velocity, propagation loss, and electromechanical coupling coefficient as functions of temperature. The measured data is analyzed using a special signal processing algorithm to obtain these acoustic properties of the Langasite.</description><subject>Acoustic measurements</subject><subject>Acoustical parameters</subject><subject>Goniometers</subject><subject>high temperature properties</subject><subject>langasite</subject><subject>Lithium niobate</subject><subject>Piezoelectric devices</subject><subject>Piezoelectric materials</subject><subject>SAW</subject><subject>Substrate</subject><subject>Surface acoustic wave devices</subject><subject>Temperature dependence</subject><subject>Temperature distribution</subject><subject>Temperature measurement</subject><subject>Zirconium</subject><isbn>1424443970</isbn><isbn>9781424443970</isbn><isbn>1424443989</isbn><isbn>9781424443987</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2009</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNpFUNFKw0AQPJGCtvYH9OV-IHEvt73L-VaC1krFhxZ8LJtm0540acidD_17IxZcGGaXGQZmhbhXkCoF7nFZrIt1mgG4dIYKldVXYqwwQ0Ttcnf9f1gYifGv0UFmc3MjpiF8wTA4y5zOb8Xbev6ZdP2p4z56DvJUyyO1ewo-sqQoD35_kJGbQaf43XN4ku9MYdgabqOkthpAx3Pw4U6MajoGnl54IjYvz5viNVl9LJbFfJV4BzEhXbuSSoXG7nKry6EQaqIKqdYqYyCDdWnQaGudqwwYAKN3FboSLGvK9UQ8_MV6Zt52vW-oP28vf9A__rRPSg</recordid><startdate>200911</startdate><enddate>200911</enddate><creator>Shrena, I.</creator><creator>Eisele, D.</creator><creator>Mayer, E.</creator><creator>Reindl, L.M.</creator><creator>Bardong, J.</creator><creator>Schmitt, M.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>200911</creationdate><title>SAW-properties of langasite at high temperatures: Measurement and analysis</title><author>Shrena, I. ; Eisele, D. ; Mayer, E. ; Reindl, L.M. ; Bardong, J. ; Schmitt, M.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i90t-a3f9bab1467c873b11043aad4af312e0a64fb64637799d6060063cd49b07e3a83</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2009</creationdate><topic>Acoustic measurements</topic><topic>Acoustical parameters</topic><topic>Goniometers</topic><topic>high temperature properties</topic><topic>langasite</topic><topic>Lithium niobate</topic><topic>Piezoelectric devices</topic><topic>Piezoelectric materials</topic><topic>SAW</topic><topic>Substrate</topic><topic>Surface acoustic wave devices</topic><topic>Temperature dependence</topic><topic>Temperature distribution</topic><topic>Temperature measurement</topic><topic>Zirconium</topic><toplevel>online_resources</toplevel><creatorcontrib>Shrena, I.</creatorcontrib><creatorcontrib>Eisele, D.</creatorcontrib><creatorcontrib>Mayer, E.</creatorcontrib><creatorcontrib>Reindl, L.M.</creatorcontrib><creatorcontrib>Bardong, J.</creatorcontrib><creatorcontrib>Schmitt, M.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEL</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Shrena, I.</au><au>Eisele, D.</au><au>Mayer, E.</au><au>Reindl, L.M.</au><au>Bardong, J.</au><au>Schmitt, M.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>SAW-properties of langasite at high temperatures: Measurement and analysis</atitle><btitle>2009 3rd International Conference on Signals, Circuits and Systems (SCS)</btitle><stitle>ICSCS</stitle><date>2009-11</date><risdate>2009</risdate><spage>1</spage><epage>4</epage><pages>1-4</pages><isbn>1424443970</isbn><isbn>9781424443970</isbn><eisbn>1424443989</eisbn><eisbn>9781424443987</eisbn><abstract>The measurement range of temperature using SAW-devices is depending on the substrate material used in the measurements. This dependence is related to the temperature point, where the substrate loses its piezoelectric properties. This occurs by the SAW-materials such as quartz and lithium niobate at about 570°C or 350°C, respectively. The piezoelectric material langasite (La3Ga5SiO14) has a thermodynamically stable phase and do not lose its piezoelectric properties up to its melting point at about 1470 °C and can be used for SAW devices at high temperatures. This paper presents the measurements of acoustical parameters of langasite up to 750°C. Langasite is used as substrate in the measurements with Euler angles (0°, 138.5°, 26.6°) and two different platinum (Pt) layer heights (45 nm and 75 nm) top of a zirconium (Zr) adhesion layer (4 nm). The investigated acoustic properties of langasite are group and phase velocity, propagation loss, and electromechanical coupling coefficient as functions of temperature. The measured data is analyzed using a special signal processing algorithm to obtain these acoustic properties of the Langasite.</abstract><pub>IEEE</pub><doi>10.1109/ICSCS.2009.5414173</doi><tpages>4</tpages></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISBN: 1424443970 |
| ispartof | 2009 3rd International Conference on Signals, Circuits and Systems (SCS), 2009, p.1-4 |
| issn | |
| language | eng |
| recordid | cdi_ieee_primary_5414173 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Acoustic measurements Acoustical parameters Goniometers high temperature properties langasite Lithium niobate Piezoelectric devices Piezoelectric materials SAW Substrate Surface acoustic wave devices Temperature dependence Temperature distribution Temperature measurement Zirconium |
| title | SAW-properties of langasite at high temperatures: Measurement and analysis |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-01T08%3A58%3A06IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=SAW-properties%20of%20langasite%20at%20high%20temperatures:%20Measurement%20and%20analysis&rft.btitle=2009%203rd%20International%20Conference%20on%20Signals,%20Circuits%20and%20Systems%20(SCS)&rft.au=Shrena,%20I.&rft.date=2009-11&rft.spage=1&rft.epage=4&rft.pages=1-4&rft.isbn=1424443970&rft.isbn_list=9781424443970&rft_id=info:doi/10.1109/ICSCS.2009.5414173&rft_dat=%3Cieee_6IE%3E5414173%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&rft.eisbn=1424443989&rft.eisbn_list=9781424443987&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=5414173&rfr_iscdi=true |