Definition of an innovative filling structure for digital blocks : the DFM filler cell

A DFM approach considers all interactions in the production flow and breaks the standard local/global context. Understanding existing solutions and their limitations in filling solution for digital blocks, we present in this paper a DFM filler cell solution that takes into account a large amount of...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Remy, L., Coll, P., Picot, F., Mico, P., Portal, J.-M.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Chemical technology Design for manufacture Design methodology Filling Flow production systems Lithography Manufacturing processes Portals Silicon Stress
Online-Zugang:	Volltext bestellen
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