Advances in pixel design and wafer fabrication for liquid crystal over silicon SLMs
In this paper we will discuss advances in silicon fabrication technology which have allowed the production of liquid crystal over silicon spatial light modulators (LCOS SLMs) with enhanced specification and performance. We will discuss advances in pixel circuit design and VLSI layout, for both DRAM...
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| creator | Underwood, I. Breslin, J.A. Burns, D.C. Snook, M.W.G. O'Hara, A. Vass, D.G. |
| description | In this paper we will discuss advances in silicon fabrication technology which have allowed the production of liquid crystal over silicon spatial light modulators (LCOS SLMs) with enhanced specification and performance. We will discuss advances in pixel circuit design and VLSI layout, for both DRAM and SRAM based pixels, which have resulted in higher pixel packing density and improved pixel performance. We will illustrate these advances using examples of our most recent SLM designs. |
| doi_str_mv | 10.1109/LEOSST.1996.540723 |
| format | Conference Proceeding |
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Advanced Applications of Lasers in Materials and Processing</btitle><stitle>LEOSST</stitle><date>1996</date><risdate>1996</risdate><spage>13</spage><epage>14</epage><pages>13-14</pages><isbn>0780331753</isbn><isbn>9780780331754</isbn><abstract>In this paper we will discuss advances in silicon fabrication technology which have allowed the production of liquid crystal over silicon spatial light modulators (LCOS SLMs) with enhanced specification and performance. We will discuss advances in pixel circuit design and VLSI layout, for both DRAM and SRAM based pixels, which have resulted in higher pixel packing density and improved pixel performance. We will illustrate these advances using examples of our most recent SLM designs.</abstract><pub>IEEE</pub><doi>10.1109/LEOSST.1996.540723</doi><tpages>2</tpages></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISBN: 0780331753 |
| ispartof | Digest IEEE/Leos 1996 Summer Topical Meeting. Advanced Applications of Lasers in Materials and Processing, 1996, p.13-14 |
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| language | eng |
| recordid | cdi_ieee_primary_540723 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Active matrix liquid crystal displays Circuit synthesis Fabrication Integrated circuit interconnections Liquid crystal devices Liquid crystal on silicon Liquid crystals Random access memory Smart pixels Transistors |
| title | Advances in pixel design and wafer fabrication for liquid crystal over silicon SLMs |
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