The integration of SWNTs with CMOS IC

This paper presents the interconnection of single - walled carbon nanotube (SWNT) between electrodes on a CMOS integrated circuit chip made by TSMC 0.35 ¿m CMOS process. Using Electroless Nickel and Immersion Gold to cover the electrodes of Al could really increase the current more than 3 orders whe...

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Hauptverfasser:	Jung-Tang Huang, Po-Chin Lin, Hom-Wi Chao, Kai-Yuan Jenq, Hou-Jun Hsu, Ting-Chiang Tsai
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Carbon nanotubes CMOS CMOS integrated circuits CMOS process Coupling circuits Electrodes Electroless Nickel Immersion Gold Gold Integrated circuit interconnections Integrated circuit measurements Nickel Semiconductor device measurement SWNT
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Beschreibung
Zusammenfassung:	This paper presents the interconnection of single - walled carbon nanotube (SWNT) between electrodes on a CMOS integrated circuit chip made by TSMC 0.35 ¿m CMOS process. Using Electroless Nickel and Immersion Gold to cover the electrodes of Al could really increase the current more than 3 orders when SWNTs are connected between electrodes. One of the applications to this chip may be gas sensing, after coupling SWNTs the electrodes will treat by NH 3 . The electrodes and circuits integration with CMOS IC and its measurement will be described in this paper.
ISSN:	1944-9399 1944-9380