Fundamental study on a thin-film AE sensor for measurement of behavior of a multi-pad contact slider
To study the fundamental dynamic characteristics of a multi-pad slider for contact recording, we developed a thin-film piezoelectric acoustic emission array sensor on an Si-suspension with an array pattern similar to that of contact pads. Experiments showed that the sensitivity of the sensor is abou...
Gespeichert in:
| Veröffentlicht in: | IEEE transactions on magnetics 1996-09, Vol.32 (5), p.3675-3677 |
|---|---|
| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 3677 |
|---|---|
| container_issue | 5 |
| container_start_page | 3675 |
| container_title | IEEE transactions on magnetics |
| container_volume | 32 |
| creator | Imai, S. Burger, G.-J. Lammerink, T.S.J. Fluitman, J.H.J. |
| description | To study the fundamental dynamic characteristics of a multi-pad slider for contact recording, we developed a thin-film piezoelectric acoustic emission array sensor on an Si-suspension with an array pattern similar to that of contact pads. Experiments showed that the sensitivity of the sensor is about 0.11 V/N (slider thickness: 0.2 mm) and that each array sensor designed here is not influenced by the acoustic waves which occur due to contact with other contact pads, so the contact or non-contact condition of each pad can be measured. |
| doi_str_mv | 10.1109/20.538725 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_RIE</sourceid><recordid>TN_cdi_ieee_primary_538725</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>538725</ieee_id><sourcerecordid>28298246</sourcerecordid><originalsourceid>FETCH-LOGICAL-c312t-5b607b341a2f64e918c489677212c1078a4879aadc74e3d2b94f2c9954e064df3</originalsourceid><addsrcrecordid>eNo9kEtLAzEUhYMoWKsLt66yElykJpnMTLIsxapQcKPrkEluaGQeNckI_fdOmeLicl_fOYuD0D2jK8aoeuZ0VRay5uUFWjAlGKG0UpdoQSmTRIlKXKOblL6nVZSMLpDbjr0zHfTZtDjl0R3x0GOD8z70xIe2w-sXnKBPQ8R-qg5MGiOcBHjwuIG9-Q3TfZoN7sY2B3IwDtthMrQZpzY4iLfoyps2wd25L9HX9uVz80Z2H6_vm_WO2ILxTMqmonVTCGa4rwQoJq2QqqprzrhltJZGyFoZ42wtoHC8UcJzq1QpgFbC-WKJHmffQxx-RkhZdyFZaFvTwzAmzSVXkotqAp9m0MYhpQheH2LoTDxqRvUpR82pnnOc2IeZDQDwz52ff9uibOM</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>28298246</pqid></control><display><type>article</type><title>Fundamental study on a thin-film AE sensor for measurement of behavior of a multi-pad contact slider</title><source>IEEE Electronic Library (IEL)</source><creator>Imai, S. ; Burger, G.-J. ; Lammerink, T.S.J. ; Fluitman, J.H.J.</creator><creatorcontrib>Imai, S. ; Burger, G.-J. ; Lammerink, T.S.J. ; Fluitman, J.H.J.</creatorcontrib><description>To study the fundamental dynamic characteristics of a multi-pad slider for contact recording, we developed a thin-film piezoelectric acoustic emission array sensor on an Si-suspension with an array pattern similar to that of contact pads. Experiments showed that the sensitivity of the sensor is about 0.11 V/N (slider thickness: 0.2 mm) and that each array sensor designed here is not influenced by the acoustic waves which occur due to contact with other contact pads, so the contact or non-contact condition of each pad can be measured.</description><identifier>ISSN: 0018-9464</identifier><identifier>EISSN: 1941-0069</identifier><identifier>DOI: 10.1109/20.538725</identifier><identifier>CODEN: IEMGAQ</identifier><language>eng</language><publisher>IEEE</publisher><subject>Acoustic arrays ; Acoustic emission ; Acoustic measurements ; Acoustic sensors ; Acoustic waves ; Piezoelectric films ; Sensor arrays ; Sensor phenomena and characterization ; Thickness measurement ; Thin film sensors</subject><ispartof>IEEE transactions on magnetics, 1996-09, Vol.32 (5), p.3675-3677</ispartof><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c312t-5b607b341a2f64e918c489677212c1078a4879aadc74e3d2b94f2c9954e064df3</citedby><cites>FETCH-LOGICAL-c312t-5b607b341a2f64e918c489677212c1078a4879aadc74e3d2b94f2c9954e064df3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/538725$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/538725$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Imai, S.</creatorcontrib><creatorcontrib>Burger, G.-J.</creatorcontrib><creatorcontrib>Lammerink, T.S.J.</creatorcontrib><creatorcontrib>Fluitman, J.H.J.</creatorcontrib><title>Fundamental study on a thin-film AE sensor for measurement of behavior of a multi-pad contact slider</title><title>IEEE transactions on magnetics</title><addtitle>TMAG</addtitle><description>To study the fundamental dynamic characteristics of a multi-pad slider for contact recording, we developed a thin-film piezoelectric acoustic emission array sensor on an Si-suspension with an array pattern similar to that of contact pads. Experiments showed that the sensitivity of the sensor is about 0.11 V/N (slider thickness: 0.2 mm) and that each array sensor designed here is not influenced by the acoustic waves which occur due to contact with other contact pads, so the contact or non-contact condition of each pad can be measured.</description><subject>Acoustic arrays</subject><subject>Acoustic emission</subject><subject>Acoustic measurements</subject><subject>Acoustic sensors</subject><subject>Acoustic waves</subject><subject>Piezoelectric films</subject><subject>Sensor arrays</subject><subject>Sensor phenomena and characterization</subject><subject>Thickness measurement</subject><subject>Thin film sensors</subject><issn>0018-9464</issn><issn>1941-0069</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1996</creationdate><recordtype>article</recordtype><recordid>eNo9kEtLAzEUhYMoWKsLt66yElykJpnMTLIsxapQcKPrkEluaGQeNckI_fdOmeLicl_fOYuD0D2jK8aoeuZ0VRay5uUFWjAlGKG0UpdoQSmTRIlKXKOblL6nVZSMLpDbjr0zHfTZtDjl0R3x0GOD8z70xIe2w-sXnKBPQ8R-qg5MGiOcBHjwuIG9-Q3TfZoN7sY2B3IwDtthMrQZpzY4iLfoyps2wd25L9HX9uVz80Z2H6_vm_WO2ILxTMqmonVTCGa4rwQoJq2QqqprzrhltJZGyFoZ42wtoHC8UcJzq1QpgFbC-WKJHmffQxx-RkhZdyFZaFvTwzAmzSVXkotqAp9m0MYhpQheH2LoTDxqRvUpR82pnnOc2IeZDQDwz52ff9uibOM</recordid><startdate>19960901</startdate><enddate>19960901</enddate><creator>Imai, S.</creator><creator>Burger, G.-J.</creator><creator>Lammerink, T.S.J.</creator><creator>Fluitman, J.H.J.</creator><general>IEEE</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>19960901</creationdate><title>Fundamental study on a thin-film AE sensor for measurement of behavior of a multi-pad contact slider</title><author>Imai, S. ; Burger, G.-J. ; Lammerink, T.S.J. ; Fluitman, J.H.J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c312t-5b607b341a2f64e918c489677212c1078a4879aadc74e3d2b94f2c9954e064df3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1996</creationdate><topic>Acoustic arrays</topic><topic>Acoustic emission</topic><topic>Acoustic measurements</topic><topic>Acoustic sensors</topic><topic>Acoustic waves</topic><topic>Piezoelectric films</topic><topic>Sensor arrays</topic><topic>Sensor phenomena and characterization</topic><topic>Thickness measurement</topic><topic>Thin film sensors</topic><toplevel>online_resources</toplevel><creatorcontrib>Imai, S.</creatorcontrib><creatorcontrib>Burger, G.-J.</creatorcontrib><creatorcontrib>Lammerink, T.S.J.</creatorcontrib><creatorcontrib>Fluitman, J.H.J.</creatorcontrib><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>IEEE transactions on magnetics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Imai, S.</au><au>Burger, G.-J.</au><au>Lammerink, T.S.J.</au><au>Fluitman, J.H.J.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Fundamental study on a thin-film AE sensor for measurement of behavior of a multi-pad contact slider</atitle><jtitle>IEEE transactions on magnetics</jtitle><stitle>TMAG</stitle><date>1996-09-01</date><risdate>1996</risdate><volume>32</volume><issue>5</issue><spage>3675</spage><epage>3677</epage><pages>3675-3677</pages><issn>0018-9464</issn><eissn>1941-0069</eissn><coden>IEMGAQ</coden><abstract>To study the fundamental dynamic characteristics of a multi-pad slider for contact recording, we developed a thin-film piezoelectric acoustic emission array sensor on an Si-suspension with an array pattern similar to that of contact pads. Experiments showed that the sensitivity of the sensor is about 0.11 V/N (slider thickness: 0.2 mm) and that each array sensor designed here is not influenced by the acoustic waves which occur due to contact with other contact pads, so the contact or non-contact condition of each pad can be measured.</abstract><pub>IEEE</pub><doi>10.1109/20.538725</doi><tpages>3</tpages><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 0018-9464 |
| ispartof | IEEE transactions on magnetics, 1996-09, Vol.32 (5), p.3675-3677 |
| issn | 0018-9464 1941-0069 |
| language | eng |
| recordid | cdi_ieee_primary_538725 |
| source | IEEE Electronic Library (IEL) |
| subjects | Acoustic arrays Acoustic emission Acoustic measurements Acoustic sensors Acoustic waves Piezoelectric films Sensor arrays Sensor phenomena and characterization Thickness measurement Thin film sensors |
| title | Fundamental study on a thin-film AE sensor for measurement of behavior of a multi-pad contact slider |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-03T23%3A17%3A11IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Fundamental%20study%20on%20a%20thin-film%20AE%20sensor%20for%20measurement%20of%20behavior%20of%20a%20multi-pad%20contact%20slider&rft.jtitle=IEEE%20transactions%20on%20magnetics&rft.au=Imai,%20S.&rft.date=1996-09-01&rft.volume=32&rft.issue=5&rft.spage=3675&rft.epage=3677&rft.pages=3675-3677&rft.issn=0018-9464&rft.eissn=1941-0069&rft.coden=IEMGAQ&rft_id=info:doi/10.1109/20.538725&rft_dat=%3Cproquest_RIE%3E28298246%3C/proquest_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=28298246&rft_id=info:pmid/&rft_ieee_id=538725&rfr_iscdi=true |