$Measurement of High Sensitivity and Low Crosstalk of Zero-Space Microlens for 2.8- \mu\hbox-Pitch Active Pixel Sensor$

Measurement of High Sensitivity and Low Crosstalk of Zero-Space Microlens for 2.8- \mu\hbox-Pitch Active Pixel Sensor

This paper describes the difference between normal microlenses and zero-space microlenses in image sensors. The investigation of both sensitivity and crosstalk has been implemented for normal microlenses and zero-space microlenses that are fabricated on a 2.8-μm pinned photodiode array of 640 (row)...

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Veröffentlicht in:	IEEE transactions on electron devices 2010-02, Vol.57 (2), p.415-421
Hauptverfasser:	Jin, Xiangliang, Fan, Xiaoping, Liu, Zhibi, Kuang, Zhangqu, Cheng, Jie, Chen, Jie, Liu, Yu, Yang, Jun
Format:	Artikel
Sprache:	eng
Schlagworte:	Active pixel sensor Arrays Crosstalk imager sensor Lenses microlens Microoptics normal microlens Pixel Sensitivity Simulation zero-space microlens
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