Dynamic Surface Profilometry and Resonant-Mode Detection for Microstructure Characterization Using Nonconventional Stroboscopic Interferometry
In this paper, an innovative method of automatic resonant-mode detection employing nonconventional stroboscopic interferometry is developed for nanoscale dynamic characterization of microstructures. Considering that a tested microstructure having an individual vibrating excitation source cannot be a...
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| Veröffentlicht in: | IEEE transactions on industrial electronics (1982) 2010-03, Vol.57 (3), p.1120-1126 |
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| container_title | IEEE transactions on industrial electronics (1982) |
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| creator | Chen, Liang-Chia Nguyen, Xuan-Loc Huang, Hsin-Sing Chen, Jin-Liang |
| description | In this paper, an innovative method of automatic resonant-mode detection employing nonconventional stroboscopic interferometry is developed for nanoscale dynamic characterization of microstructures. Considering that a tested microstructure having an individual vibrating excitation source cannot be analyzed directly by the traditional stroboscopic method, an optical microscopy based on new stroboscopic interferometry was established to achieve resonant-mode detection and full-field vibratory out-of-plane surface profilometry of microstructures. To verify the effectiveness of the developed methodology, a crossbridge microbeam was measured to analyze the resonant vibratory modes and full-field dynamic-mode characterization. The experimental results confirm that the dynamic behavior of the microstructures can be accurately characterized with satisfactory mode-detection accuracy and surface profilometry. |
| doi_str_mv | 10.1109/TIE.2009.2036645 |
| format | Article |
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Considering that a tested microstructure having an individual vibrating excitation source cannot be analyzed directly by the traditional stroboscopic method, an optical microscopy based on new stroboscopic interferometry was established to achieve resonant-mode detection and full-field vibratory out-of-plane surface profilometry of microstructures. To verify the effectiveness of the developed methodology, a crossbridge microbeam was measured to analyze the resonant vibratory modes and full-field dynamic-mode characterization. The experimental results confirm that the dynamic behavior of the microstructures can be accurately characterized with satisfactory mode-detection accuracy and surface profilometry.</description><identifier>ISSN: 0278-0046</identifier><identifier>EISSN: 1557-9948</identifier><identifier>DOI: 10.1109/TIE.2009.2036645</identifier><identifier>CODEN: ITIED6</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Dynamic profilometry ; Dynamics ; Frequency synchronization ; Industrial electronics ; Interferometry ; Joining processes ; Light sources ; microelectromechanical systems (MEMS) ; Micromechanical devices ; Microorganisms ; Microstructure ; Nanocomposites ; Nanomaterials ; Nanostructure ; Optical interferometry ; Optical microscopy ; Resonance ; resonant mode ; stroboscopic interferometry ; Testing ; Vibration measurement</subject><ispartof>IEEE transactions on industrial electronics (1982), 2010-03, Vol.57 (3), p.1120-1126</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) Mar 2010</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c354t-790f141b79888873dd78a0af66b89aafa82571fc6c5939ef60dced3da9c6b7403</citedby><cites>FETCH-LOGICAL-c354t-790f141b79888873dd78a0af66b89aafa82571fc6c5939ef60dced3da9c6b7403</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5340669$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5340669$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Chen, Liang-Chia</creatorcontrib><creatorcontrib>Nguyen, Xuan-Loc</creatorcontrib><creatorcontrib>Huang, Hsin-Sing</creatorcontrib><creatorcontrib>Chen, Jin-Liang</creatorcontrib><title>Dynamic Surface Profilometry and Resonant-Mode Detection for Microstructure Characterization Using Nonconventional Stroboscopic Interferometry</title><title>IEEE transactions on industrial electronics (1982)</title><addtitle>TIE</addtitle><description>In this paper, an innovative method of automatic resonant-mode detection employing nonconventional stroboscopic interferometry is developed for nanoscale dynamic characterization of microstructures. Considering that a tested microstructure having an individual vibrating excitation source cannot be analyzed directly by the traditional stroboscopic method, an optical microscopy based on new stroboscopic interferometry was established to achieve resonant-mode detection and full-field vibratory out-of-plane surface profilometry of microstructures. To verify the effectiveness of the developed methodology, a crossbridge microbeam was measured to analyze the resonant vibratory modes and full-field dynamic-mode characterization. The experimental results confirm that the dynamic behavior of the microstructures can be accurately characterized with satisfactory mode-detection accuracy and surface profilometry.</description><subject>Dynamic profilometry</subject><subject>Dynamics</subject><subject>Frequency synchronization</subject><subject>Industrial electronics</subject><subject>Interferometry</subject><subject>Joining processes</subject><subject>Light sources</subject><subject>microelectromechanical systems (MEMS)</subject><subject>Micromechanical devices</subject><subject>Microorganisms</subject><subject>Microstructure</subject><subject>Nanocomposites</subject><subject>Nanomaterials</subject><subject>Nanostructure</subject><subject>Optical interferometry</subject><subject>Optical microscopy</subject><subject>Resonance</subject><subject>resonant mode</subject><subject>stroboscopic interferometry</subject><subject>Testing</subject><subject>Vibration measurement</subject><issn>0278-0046</issn><issn>1557-9948</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2010</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNqFkUtvEzEQxy1EJULgjsTF4sJpix2_1keUFojU0qqPs-V4x-BqYwfbWyl8CD4zXlJx4MIcZqTRb55_hN5Qckop0R_uNuenK0J0c0xKLp6hBRVCdVrz_jlakJXqO0K4fIFelvJACOWCigX6dXaIdhccvp2ytw7wdU4-jGkHNR-wjQO-gZKijbW7TAPgM6jgakgR-5TxZXA5lZonV6cMeP3dZusq5PDT_mHuS4jf8NcUXYqPEOecHfFtzWmbikv7NncTG-8hHye-QifejgVeP8Uluv90frf-0l1cfd6sP150jgleO6WJp5xule6bKTYMqrfEeim3vbbW234lFPVOOqGZBi_J4GBgg9VObhUnbIneH_vuc_oxQalmF4qDcbQR0lRMrwQRjDP9X1Lx-d2MqUa--4d8SFNuBxejqeZt59ZyicgRmh9XMnizz2Fn88FQYmYhTRPSzEKaJyFbydtjSQCAv3jbjkip2W9ZSJ0y</recordid><startdate>201003</startdate><enddate>201003</enddate><creator>Chen, Liang-Chia</creator><creator>Nguyen, Xuan-Loc</creator><creator>Huang, Hsin-Sing</creator><creator>Chen, Jin-Liang</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. 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Considering that a tested microstructure having an individual vibrating excitation source cannot be analyzed directly by the traditional stroboscopic method, an optical microscopy based on new stroboscopic interferometry was established to achieve resonant-mode detection and full-field vibratory out-of-plane surface profilometry of microstructures. To verify the effectiveness of the developed methodology, a crossbridge microbeam was measured to analyze the resonant vibratory modes and full-field dynamic-mode characterization. The experimental results confirm that the dynamic behavior of the microstructures can be accurately characterized with satisfactory mode-detection accuracy and surface profilometry.</abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/TIE.2009.2036645</doi><tpages>7</tpages></addata></record> |
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| ispartof | IEEE transactions on industrial electronics (1982), 2010-03, Vol.57 (3), p.1120-1126 |
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| source | IEEE Electronic Library (IEL) |
| subjects | Dynamic profilometry Dynamics Frequency synchronization Industrial electronics Interferometry Joining processes Light sources microelectromechanical systems (MEMS) Micromechanical devices Microorganisms Microstructure Nanocomposites Nanomaterials Nanostructure Optical interferometry Optical microscopy Resonance resonant mode stroboscopic interferometry Testing Vibration measurement |
| title | Dynamic Surface Profilometry and Resonant-Mode Detection for Microstructure Characterization Using Nonconventional Stroboscopic Interferometry |
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