FEM simulation of piezoresistive pressure module

FEM simulation of piezoresistive pressure module

The impact of singularity points on stress distribution in piezoresistive module is investigated by means of FEM simulation. Strong influence of singularities on stress distribution in silicon-glass interface is presented in this paper.

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Bibliographische Detailangaben
Hauptverfasser: Gridchin, V.A., Chebanov, M.A.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Capacitive sensors
FEM simulation
Glass
Mathematical model
Mechanical sensors
Piezoresistance
Piezoresistive devices
pressure sensor
Seminars
Silicon
singular points
Stress
Temperature sensors
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Beschreibung
Zusammenfassung:The impact of singularity points on stress distribution in piezoresistive module is investigated by means of FEM simulation. Strong influence of singularities on stress distribution in silicon-glass interface is presented in this paper.
DOI:10.1109/INTERNANO.2009.5335638