PECVD deposition of a-B/C on Si using a surface-ECR plasma source and o-carborane precursor gas

Summary form only given, as follows. Vacuum wall deposition of a-B/C films has had tremendous positive impact on the performance of tokamak fusion reactors. In the present work, sublimed gas from o-carborane and helium carrier gas are used to create a plasma using the surface-ECR source. The plasma...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Geddes, J.B., Getty, W.D.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Density measurement Electrons Fusion reactors Helium Plasma density Plasma measurements Plasma sources Plasma temperature Probes Tokamaks
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