High Aspect-Ratio Coplanar Waveguide Wideband Bandpass Filter With Compact Unit Cells
This paper introduces a micromachined thick single-metal-layer high aspect-ratio coplanar waveguide (CPW) wideband bandpass filter with compact unit cells based on the electromagnetic bandgap (EBG) concept. The filter is miniaturized as a result of using the EBG concept in design, and also by realiz...
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| Veröffentlicht in: | IEEE transactions on microwave theory and techniques 2009-11, Vol.57 (11), p.2753-2760 |
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| container_title | IEEE transactions on microwave theory and techniques |
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| creator | Klymyshyn, D.M. Jayatilaka, H.C. Borner, M. Mohr, J. |
| description | This paper introduces a micromachined thick single-metal-layer high aspect-ratio coplanar waveguide (CPW) wideband bandpass filter with compact unit cells based on the electromagnetic bandgap (EBG) concept. The filter is miniaturized as a result of using the EBG concept in design, and also by realizing high aspect-ratio structures with polymer-based deep X-ray lithography fabrication. Cascaded unit cells in the EBG model consist of capacitive and inductive parallel periodically loaded transmission lines, which determine the filter bandwidth. Compact unit cells are realized by using high aspect-ratio CPW stepped-impedance resonators. The main advantage of this approach is that the high aspect-ratio CPW structures make short unit cells practically realizable, resulting in a compact filter structure. A bandpass filter with 47% bandwidth is designed and fabricated using deep X-ray lithography, and the performance and physical size is compared to a conventional quarter-wavelength-based admittance inverter filter. |
| doi_str_mv | 10.1109/TMTT.2009.2032347 |
| format | Article |
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The filter is miniaturized as a result of using the EBG concept in design, and also by realizing high aspect-ratio structures with polymer-based deep X-ray lithography fabrication. Cascaded unit cells in the EBG model consist of capacitive and inductive parallel periodically loaded transmission lines, which determine the filter bandwidth. Compact unit cells are realized by using high aspect-ratio CPW stepped-impedance resonators. The main advantage of this approach is that the high aspect-ratio CPW structures make short unit cells practically realizable, resulting in a compact filter structure. A bandpass filter with 47% bandwidth is designed and fabricated using deep X-ray lithography, and the performance and physical size is compared to a conventional quarter-wavelength-based admittance inverter filter.</description><identifier>ISSN: 0018-9480</identifier><identifier>EISSN: 1557-9670</identifier><identifier>DOI: 10.1109/TMTT.2009.2032347</identifier><identifier>CODEN: IETMAB</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Applied sciences ; Band pass filters ; Bandpass filter ; Bandpass filters ; Bandwidth ; Circuit properties ; coplanar waveguide (CPW) transmission line ; Coplanar waveguides ; deep X-ray lithography ; Electric, optical and optoelectronic circuits ; Electromagnetic waveguides ; electromagnetic-bandgap (EBG) structures ; Electronic circuits ; Electronics ; Exact sciences and technology ; Frequency filters ; high aspect ratio ; Lithography ; Metamaterials ; Microelectronic fabrication (materials and surfaces technology) ; microfabrication ; micromachining ; Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits ; Microwaves ; Oscillators, resonators, synthetizers ; Periodic structures ; Polymers ; Resonator filters ; RF microelectromechanical systems (MEMS) ; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices ; Unit cell ; Wideband ; X-ray lithography ; X-rays</subject><ispartof>IEEE transactions on microwave theory and techniques, 2009-11, Vol.57 (11), p.2753-2760</ispartof><rights>2015 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2009</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c385t-13f7e0f2902ce7c7f8916cfe247f390c38eca284b1a40d45b8f7d2eed40e7db13</citedby><cites>FETCH-LOGICAL-c385t-13f7e0f2902ce7c7f8916cfe247f390c38eca284b1a40d45b8f7d2eed40e7db13</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5280354$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,776,780,792,27901,27902,54733</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5280354$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=22492998$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Klymyshyn, D.M.</creatorcontrib><creatorcontrib>Jayatilaka, H.C.</creatorcontrib><creatorcontrib>Borner, M.</creatorcontrib><creatorcontrib>Mohr, J.</creatorcontrib><title>High Aspect-Ratio Coplanar Waveguide Wideband Bandpass Filter With Compact Unit Cells</title><title>IEEE transactions on microwave theory and techniques</title><addtitle>TMTT</addtitle><description>This paper introduces a micromachined thick single-metal-layer high aspect-ratio coplanar waveguide (CPW) wideband bandpass filter with compact unit cells based on the electromagnetic bandgap (EBG) concept. The filter is miniaturized as a result of using the EBG concept in design, and also by realizing high aspect-ratio structures with polymer-based deep X-ray lithography fabrication. Cascaded unit cells in the EBG model consist of capacitive and inductive parallel periodically loaded transmission lines, which determine the filter bandwidth. Compact unit cells are realized by using high aspect-ratio CPW stepped-impedance resonators. The main advantage of this approach is that the high aspect-ratio CPW structures make short unit cells practically realizable, resulting in a compact filter structure. A bandpass filter with 47% bandwidth is designed and fabricated using deep X-ray lithography, and the performance and physical size is compared to a conventional quarter-wavelength-based admittance inverter filter.</description><subject>Applied sciences</subject><subject>Band pass filters</subject><subject>Bandpass filter</subject><subject>Bandpass filters</subject><subject>Bandwidth</subject><subject>Circuit properties</subject><subject>coplanar waveguide (CPW) transmission line</subject><subject>Coplanar waveguides</subject><subject>deep X-ray lithography</subject><subject>Electric, optical and optoelectronic circuits</subject><subject>Electromagnetic waveguides</subject><subject>electromagnetic-bandgap (EBG) structures</subject><subject>Electronic circuits</subject><subject>Electronics</subject><subject>Exact sciences and technology</subject><subject>Frequency filters</subject><subject>high aspect ratio</subject><subject>Lithography</subject><subject>Metamaterials</subject><subject>Microelectronic fabrication (materials and surfaces technology)</subject><subject>microfabrication</subject><subject>micromachining</subject><subject>Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits</subject><subject>Microwaves</subject><subject>Oscillators, resonators, synthetizers</subject><subject>Periodic structures</subject><subject>Polymers</subject><subject>Resonator filters</subject><subject>RF microelectromechanical systems (MEMS)</subject><subject>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</subject><subject>Unit cell</subject><subject>Wideband</subject><subject>X-ray lithography</subject><subject>X-rays</subject><issn>0018-9480</issn><issn>1557-9670</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2009</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNp9kU9rGzEQxUVpoW6aDxByWQJtTpuO_q2kY2KSuOBSKDY-Clk7chTWu9vVutBvHy02OeSQyxNCvzeamUfIBYUbSsH8WP1arW4YgMnCGRfqA5lRKVVpKgUfyQyA6tIIDZ_Jl5Se81VI0DOyXsTdU3GbevRj-ceNsSvmXd-41g3Fxv3D3SHWWGyybF1bF3dZepdS8RCbETMSx6ds2PfOj8W6jWMxx6ZJX8mn4JqE56fzjKwf7lfzRbn8_fhzfrssPddyLCkPCiEwA8yj8ipoQysfkAkVuIEMoXdMiy11AmohtzqomiHWAlDVW8rPyPWxbj90fw-YRruPyecOXIvdIVldGS2V1DqT398lecVFZUBm8OoN-NwdhjZPYbWsTF6bnv6lR8gPXUoDBtsPce-G_5aCnfKwUx52ysOe8sieb6fCLnnXhMG1PqZXI2PCMGOmTi-PXETE12fJNHAp-AvadpKf</recordid><startdate>20091101</startdate><enddate>20091101</enddate><creator>Klymyshyn, D.M.</creator><creator>Jayatilaka, H.C.</creator><creator>Borner, M.</creator><creator>Mohr, J.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>8FD</scope><scope>L7M</scope><scope>F28</scope><scope>FR3</scope></search><sort><creationdate>20091101</creationdate><title>High Aspect-Ratio Coplanar Waveguide Wideband Bandpass Filter With Compact Unit Cells</title><author>Klymyshyn, D.M. ; Jayatilaka, H.C. ; Borner, M. ; Mohr, J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c385t-13f7e0f2902ce7c7f8916cfe247f390c38eca284b1a40d45b8f7d2eed40e7db13</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2009</creationdate><topic>Applied sciences</topic><topic>Band pass filters</topic><topic>Bandpass filter</topic><topic>Bandpass filters</topic><topic>Bandwidth</topic><topic>Circuit properties</topic><topic>coplanar waveguide (CPW) transmission line</topic><topic>Coplanar waveguides</topic><topic>deep X-ray lithography</topic><topic>Electric, optical and optoelectronic circuits</topic><topic>Electromagnetic waveguides</topic><topic>electromagnetic-bandgap (EBG) structures</topic><topic>Electronic circuits</topic><topic>Electronics</topic><topic>Exact sciences and technology</topic><topic>Frequency filters</topic><topic>high aspect ratio</topic><topic>Lithography</topic><topic>Metamaterials</topic><topic>Microelectronic fabrication (materials and surfaces technology)</topic><topic>microfabrication</topic><topic>micromachining</topic><topic>Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits</topic><topic>Microwaves</topic><topic>Oscillators, resonators, synthetizers</topic><topic>Periodic structures</topic><topic>Polymers</topic><topic>Resonator filters</topic><topic>RF microelectromechanical systems (MEMS)</topic><topic>Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices</topic><topic>Unit cell</topic><topic>Wideband</topic><topic>X-ray lithography</topic><topic>X-rays</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Klymyshyn, D.M.</creatorcontrib><creatorcontrib>Jayatilaka, H.C.</creatorcontrib><creatorcontrib>Borner, M.</creatorcontrib><creatorcontrib>Mohr, J.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998–Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><jtitle>IEEE transactions on microwave theory and techniques</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Klymyshyn, D.M.</au><au>Jayatilaka, H.C.</au><au>Borner, M.</au><au>Mohr, J.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>High Aspect-Ratio Coplanar Waveguide Wideband Bandpass Filter With Compact Unit Cells</atitle><jtitle>IEEE transactions on microwave theory and techniques</jtitle><stitle>TMTT</stitle><date>2009-11-01</date><risdate>2009</risdate><volume>57</volume><issue>11</issue><spage>2753</spage><epage>2760</epage><pages>2753-2760</pages><issn>0018-9480</issn><eissn>1557-9670</eissn><coden>IETMAB</coden><abstract>This paper introduces a micromachined thick single-metal-layer high aspect-ratio coplanar waveguide (CPW) wideband bandpass filter with compact unit cells based on the electromagnetic bandgap (EBG) concept. The filter is miniaturized as a result of using the EBG concept in design, and also by realizing high aspect-ratio structures with polymer-based deep X-ray lithography fabrication. Cascaded unit cells in the EBG model consist of capacitive and inductive parallel periodically loaded transmission lines, which determine the filter bandwidth. Compact unit cells are realized by using high aspect-ratio CPW stepped-impedance resonators. The main advantage of this approach is that the high aspect-ratio CPW structures make short unit cells practically realizable, resulting in a compact filter structure. A bandpass filter with 47% bandwidth is designed and fabricated using deep X-ray lithography, and the performance and physical size is compared to a conventional quarter-wavelength-based admittance inverter filter.</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/TMTT.2009.2032347</doi><tpages>8</tpages></addata></record> |
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| subjects | Applied sciences Band pass filters Bandpass filter Bandpass filters Bandwidth Circuit properties coplanar waveguide (CPW) transmission line Coplanar waveguides deep X-ray lithography Electric, optical and optoelectronic circuits Electromagnetic waveguides electromagnetic-bandgap (EBG) structures Electronic circuits Electronics Exact sciences and technology Frequency filters high aspect ratio Lithography Metamaterials Microelectronic fabrication (materials and surfaces technology) microfabrication micromachining Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits Microwaves Oscillators, resonators, synthetizers Periodic structures Polymers Resonator filters RF microelectromechanical systems (MEMS) Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Unit cell Wideband X-ray lithography X-rays |
| title | High Aspect-Ratio Coplanar Waveguide Wideband Bandpass Filter With Compact Unit Cells |
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