In-suit observations of mechanical stress in Al interconnect line under thermal/electrical conditions

In-situ observation of stress in Al interconnects under electromigration and thermal effect by using the synchrotron radiation x-ray diffraction. The test temperature was controlled by changing the current density of W (self-heating structure). The EM-induced stress was also investigated with curren...

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Bibliographische Detailangaben

Hauptverfasser:	Li, Zhiguo, Wu, Yuehua, Fu, Houkui, Guo, Chunsheng, Ji, Yuan, Liu, Zhimin
Format:	Buchkapitel
Sprache:	eng
Schlagworte:	Al interconnect Aluminum Artificial intelligence Current density electro-migration FEM Residual stresses Synchrotron radiation Temperature control Testing thermal stress Thermal stresses Welding x-ray X-ray diffraction
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